Method of depositing a high-emissivity layer
Abstract
A method of depositing a high-emissivity layer on a substrate comprising RF sputter deposition of a carbide-containing target in an atmosphere of a hydrocarbon gas and a noble gas. As the carbide is deposited on the substrate the hydrocarbon gas decomposes to hydrogen and carbon. The carbon deposits on the target and substrate causing a carbide/carbon composition gradient to form on the substrate. At a sufficiently high partial pressure of hydrocarbon gas, a film of high-emissivity pure carbon will eventually form over the substrate.
- Inventors:
-
- (Columbus, OH)
- (Powell, OH)
- Issue Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 864770
- Patent Number(s):
- 4414085
- Assignee:
- Wickersham; Charles E. (Columbus, OH); Foster; Ellis L. (Powell, OH) LLNL
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; depositing; high-emissivity; layer; substrate; comprising; rf; sputter; deposition; carbide-containing; target; atmosphere; hydrocarbon; gas; noble; carbide; deposited; decomposes; hydrogen; carbon; deposits; causing; composition; gradient; form; sufficiently; partial; pressure; film; pure; eventually; substrate comprising; rf sputter; carbon deposits; pure carbon; sputter deposition; hydrocarbon gas; partial pressure; noble gas; sputter deposit; high-emissivity layer; rate comprising; carbon composition; /204/
Citation Formats
Wickersham, Charles E., and Foster, Ellis L. Method of depositing a high-emissivity layer. United States: N. p., 1983.
Web.
Wickersham, Charles E., & Foster, Ellis L. Method of depositing a high-emissivity layer. United States.
Wickersham, Charles E., and Foster, Ellis L. Sat .
"Method of depositing a high-emissivity layer". United States. https://www.osti.gov/servlets/purl/864770.
@article{osti_864770,
title = {Method of depositing a high-emissivity layer},
author = {Wickersham, Charles E. and Foster, Ellis L.},
abstractNote = {A method of depositing a high-emissivity layer on a substrate comprising RF sputter deposition of a carbide-containing target in an atmosphere of a hydrocarbon gas and a noble gas. As the carbide is deposited on the substrate the hydrocarbon gas decomposes to hydrogen and carbon. The carbon deposits on the target and substrate causing a carbide/carbon composition gradient to form on the substrate. At a sufficiently high partial pressure of hydrocarbon gas, a film of high-emissivity pure carbon will eventually form over the substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1983},
month = {1}
}
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