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Title: Quartz resonator processing system

Abstract

Disclosed is a single chamber ultra-high vacuum processing system for the oduction of hermetically sealed quartz resonators wherein electrode metallization and sealing are carried out along with cleaning and bake-out without any air exposure between the processing steps. The system includes a common vacuum chamber in which is located a rotatable wheel-like member which is adapted to move a plurality of individual component sets of a flat pack resonator unit past discretely located processing stations in said chamber whereupon electrode deposition takes place followed by the placement of ceramic covers over a frame containing a resonator element and then to a sealing stage where a pair of hydraulic rams including heating elements effect a metallized bonding of the covers to the frame.

Inventors:
 [1]
  1. (Rustburg, VA)
Issue Date:
Research Org.:
General Electric Co., St. Petersburg, FL (USA). Neutron Devices Dept.
OSTI Identifier:
864611
Patent Number(s):
4392287
Assignee:
United States of America as represented by Secretary of Army (Washington, DC) OSTI
DOE Contract Number:  
EY-76-C-04-0656
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
quartz; resonator; processing; disclosed; single; chamber; ultra-high; vacuum; oduction; hermetically; sealed; resonators; electrode; metallization; sealing; carried; cleaning; bake-out; air; exposure; steps; common; located; rotatable; wheel-like; adapted; move; plurality; individual; component; sets; flat; pack; unit; past; discretely; stations; whereupon; deposition; takes; followed; placement; ceramic; covers; frame; containing; element; stage; pair; hydraulic; rams; including; heating; elements; effect; metallized; bonding; single chamber; heating elements; quartz resonator; heating element; hermetically sealed; vacuum chamber; processing steps; ultra-high vacuum; processing step; electrode metal; sealed quartz; resonator element; ceramic cover; frame containing; including heat; hermetically seal; individual component; rotatable wheel; vacuum process; /29/228/

Citation Formats

Peters, Roswell D. M. Quartz resonator processing system. United States: N. p., 1983. Web.
Peters, Roswell D. M. Quartz resonator processing system. United States.
Peters, Roswell D. M. Sat . "Quartz resonator processing system". United States. https://www.osti.gov/servlets/purl/864611.
@article{osti_864611,
title = {Quartz resonator processing system},
author = {Peters, Roswell D. M.},
abstractNote = {Disclosed is a single chamber ultra-high vacuum processing system for the oduction of hermetically sealed quartz resonators wherein electrode metallization and sealing are carried out along with cleaning and bake-out without any air exposure between the processing steps. The system includes a common vacuum chamber in which is located a rotatable wheel-like member which is adapted to move a plurality of individual component sets of a flat pack resonator unit past discretely located processing stations in said chamber whereupon electrode deposition takes place followed by the placement of ceramic covers over a frame containing a resonator element and then to a sealing stage where a pair of hydraulic rams including heating elements effect a metallized bonding of the covers to the frame.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1983},
month = {1}
}

Patent:

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