Quartz resonator processing system
Abstract
Disclosed is a single chamber ultra-high vacuum processing system for the oduction of hermetically sealed quartz resonators wherein electrode metallization and sealing are carried out along with cleaning and bake-out without any air exposure between the processing steps. The system includes a common vacuum chamber in which is located a rotatable wheel-like member which is adapted to move a plurality of individual component sets of a flat pack resonator unit past discretely located processing stations in said chamber whereupon electrode deposition takes place followed by the placement of ceramic covers over a frame containing a resonator element and then to a sealing stage where a pair of hydraulic rams including heating elements effect a metallized bonding of the covers to the frame.
- Inventors:
-
- Rustburg, VA
- Issue Date:
- Research Org.:
- General Electric Co., St. Petersburg, FL (USA). Neutron Devices Dept.
- OSTI Identifier:
- 864611
- Patent Number(s):
- 4392287
- Assignee:
- United States of America as represented by Secretary of Army (Washington, DC)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- EY-76-C-04-0656
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- quartz; resonator; processing; disclosed; single; chamber; ultra-high; vacuum; oduction; hermetically; sealed; resonators; electrode; metallization; sealing; carried; cleaning; bake-out; air; exposure; steps; common; located; rotatable; wheel-like; adapted; move; plurality; individual; component; sets; flat; pack; unit; past; discretely; stations; whereupon; deposition; takes; followed; placement; ceramic; covers; frame; containing; element; stage; pair; hydraulic; rams; including; heating; elements; effect; metallized; bonding; single chamber; heating elements; quartz resonator; heating element; hermetically sealed; vacuum chamber; processing steps; ultra-high vacuum; processing step; electrode metal; sealed quartz; resonator element; ceramic cover; frame containing; including heat; hermetically seal; individual component; rotatable wheel; vacuum process; /29/228/
Citation Formats
Peters, Roswell D. M. Quartz resonator processing system. United States: N. p., 1983.
Web.
Peters, Roswell D. M. Quartz resonator processing system. United States.
Peters, Roswell D. M. Sat .
"Quartz resonator processing system". United States. https://www.osti.gov/servlets/purl/864611.
@article{osti_864611,
title = {Quartz resonator processing system},
author = {Peters, Roswell D. M.},
abstractNote = {Disclosed is a single chamber ultra-high vacuum processing system for the oduction of hermetically sealed quartz resonators wherein electrode metallization and sealing are carried out along with cleaning and bake-out without any air exposure between the processing steps. The system includes a common vacuum chamber in which is located a rotatable wheel-like member which is adapted to move a plurality of individual component sets of a flat pack resonator unit past discretely located processing stations in said chamber whereupon electrode deposition takes place followed by the placement of ceramic covers over a frame containing a resonator element and then to a sealing stage where a pair of hydraulic rams including heating elements effect a metallized bonding of the covers to the frame.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1983},
month = {1}
}