skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: High power linear pulsed beam annealer

Abstract

A high power pulsed electron beam is produced in a system comprised of an electron gun having a heated cathode, control grid, focus ring, and a curved drift tube. The drift tube is maintained at a high positive voltage with respect to the cathode to accelerate electrons passing through the focus ring and to thereby eliminate space charge. A coil surrounding the curved drift tube provides a magnetic field which maintains the electron beam focused about the axis of the tube and imparts motion on electrons in a spiral path for shallow penetration of the electrons into a target. The curvature of the tube is selected so there is no line of sight between the cathode and a target holder positioned within a second drift tube spaced coaxially from the curved tube. The second tube and the target holder are maintained at a reference voltage that decelerates the electrons. A second coil surrounding the second drift tube maintains the electron beam focused about the axis of the second drift tube and compresses the electron beam to the area of the target. The target holder can be adjusted to position the target where the cross section of the beam matches themore » area of the target.« less

Inventors:
 [1];  [2];  [3]
  1. (Concord, CA)
  2. (Berkeley, CA)
  3. (Sunnyvale, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
864481
Patent Number(s):
4371774
Assignee:
United States of America as represented by United States (Washington, DC) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
power; linear; pulsed; beam; annealer; electron; produced; comprised; gun; heated; cathode; control; grid; focus; curved; drift; tube; maintained; positive; voltage; respect; accelerate; electrons; passing; eliminate; space; charge; coil; surrounding; provides; magnetic; field; maintains; focused; axis; imparts; motion; spiral; path; shallow; penetration; target; curvature; selected; line; sight; holder; positioned; spaced; coaxially; reference; decelerates; compresses; adjusted; position; section; matches; power pulsed; power pulse; power line; magnetic field; electron beam; electron gun; drift tube; reference voltage; space charge; pulsed electron; accelerate electrons; pulsed beam; electrons passing; beam focus; linear pulse; positive voltage; electrons pass; /219/250/313/315/

Citation Formats

Strathman, Michael D., Sadana, Devendra K., and True, Richard B. High power linear pulsed beam annealer. United States: N. p., 1983. Web.
Strathman, Michael D., Sadana, Devendra K., & True, Richard B. High power linear pulsed beam annealer. United States.
Strathman, Michael D., Sadana, Devendra K., and True, Richard B. Sat . "High power linear pulsed beam annealer". United States. https://www.osti.gov/servlets/purl/864481.
@article{osti_864481,
title = {High power linear pulsed beam annealer},
author = {Strathman, Michael D. and Sadana, Devendra K. and True, Richard B.},
abstractNote = {A high power pulsed electron beam is produced in a system comprised of an electron gun having a heated cathode, control grid, focus ring, and a curved drift tube. The drift tube is maintained at a high positive voltage with respect to the cathode to accelerate electrons passing through the focus ring and to thereby eliminate space charge. A coil surrounding the curved drift tube provides a magnetic field which maintains the electron beam focused about the axis of the tube and imparts motion on electrons in a spiral path for shallow penetration of the electrons into a target. The curvature of the tube is selected so there is no line of sight between the cathode and a target holder positioned within a second drift tube spaced coaxially from the curved tube. The second tube and the target holder are maintained at a reference voltage that decelerates the electrons. A second coil surrounding the second drift tube maintains the electron beam focused about the axis of the second drift tube and compresses the electron beam to the area of the target. The target holder can be adjusted to position the target where the cross section of the beam matches the area of the target.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1983},
month = {1}
}

Patent:

Save / Share: