Process for the production of ultrahigh purity silane with recycle from separation columns
Abstract
Tri- and dichlorosilanes formed by hydrogenation in the course of the reaction of metallurgical silicon, hydrogen and recycle silicon tetrachloride are employed as feed into a separation column arrangement of sequential separation columns and redistribution reactors which processes the feed into ultrahigh purity silane and recycle silicon tetrachloride. A slip stream is removed from the bottom of two sequential columns and added to the recycle silicon tetrachloride process stream causing impurities in the slip streams to be subjected to reactions in the hydrogenation step whereby waste materials can be formed and readily separated.
- Inventors:
-
- Tonawanda, NY
- Issue Date:
- OSTI Identifier:
- 864275
- Patent Number(s):
- 4340574
- Application Number:
- 06/182,148
- Assignee:
- Union Carbide Corporation (New York, NY)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- process; production; ultrahigh; purity; silane; recycle; separation; columns; tri-; dichlorosilanes; formed; hydrogenation; course; reaction; metallurgical; silicon; hydrogen; tetrachloride; employed; feed; column; arrangement; sequential; redistribution; reactors; processes; slip; stream; removed; bottom; added; causing; impurities; streams; subjected; reactions; step; whereby; waste; materials; readily; separated; readily separated; separation column; process stream; waste material; waste materials; slip stream; separation columns; purity silane; metallurgical silicon; hydrogenation step; separation colum; /423/203/
Citation Formats
Coleman, Larry M. Process for the production of ultrahigh purity silane with recycle from separation columns. United States: N. p., 1982.
Web.
Coleman, Larry M. Process for the production of ultrahigh purity silane with recycle from separation columns. United States.
Coleman, Larry M. Tue .
"Process for the production of ultrahigh purity silane with recycle from separation columns". United States. https://www.osti.gov/servlets/purl/864275.
@article{osti_864275,
title = {Process for the production of ultrahigh purity silane with recycle from separation columns},
author = {Coleman, Larry M},
abstractNote = {Tri- and dichlorosilanes formed by hydrogenation in the course of the reaction of metallurgical silicon, hydrogen and recycle silicon tetrachloride are employed as feed into a separation column arrangement of sequential separation columns and redistribution reactors which processes the feed into ultrahigh purity silane and recycle silicon tetrachloride. A slip stream is removed from the bottom of two sequential columns and added to the recycle silicon tetrachloride process stream causing impurities in the slip streams to be subjected to reactions in the hydrogenation step whereby waste materials can be formed and readily separated.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1982},
month = {7}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.