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Title: Fabricating amorphous silicon solar cells by varying the temperature _of the substrate during deposition of the amorphous silicon layer

An improved process for fabricating amorphous silicon solar cells in which the temperature of the substrate is varied during the deposition of the amorphous silicon layer is described. Solar cells manufactured in accordance with this process are shown to have increased efficiencies and fill factors when compared to solar cells manufactured with a constant substrate temperature during deposition of the amorphous silicon layer.
Inventors:
 [1]
  1. (Yardley, PA)
Issue Date:
OSTI Identifier:
864267
Assignee:
RCA Corporation (New York, NY) NREL
Patent Number(s):
US 4339470
Contract Number:
EG-77-C-01-4042
Research Org:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Country of Publication:
United States
Language:
English
Subject:
fabricating; amorphous; silicon; solar; cells; varying; temperature; substrate; deposition; layer; improved; process; varied; described; manufactured; accordance; shown; increased; efficiencies; fill; factors; compared; constant; improved process; silicon layer; amorphous silicon; solar cell; solar cells; silicon solar; substrate temperature; rate temperature; fabricating amorphous; increased efficiencies; fill factor; fill factors; /438/136/427/