Fabricating amorphous silicon solar cells by varying the temperature _of the substrate during deposition of the amorphous silicon layer
Abstract
An improved process for fabricating amorphous silicon solar cells in which the temperature of the substrate is varied during the deposition of the amorphous silicon layer is described. Solar cells manufactured in accordance with this process are shown to have increased efficiencies and fill factors when compared to solar cells manufactured with a constant substrate temperature during deposition of the amorphous silicon layer.
- Inventors:
-
- Yardley, PA
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- OSTI Identifier:
- 864267
- Patent Number(s):
- 4339470
- Assignee:
- RCA Corporation (New York, NY)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- EG-77-C-01-4042
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- fabricating; amorphous; silicon; solar; cells; varying; temperature; substrate; deposition; layer; improved; process; varied; described; manufactured; accordance; shown; increased; efficiencies; fill; factors; compared; constant; improved process; silicon layer; amorphous silicon; solar cell; solar cells; silicon solar; substrate temperature; rate temperature; fabricating amorphous; increased efficiencies; fill factor; fill factors; /438/136/427/
Citation Formats
Carlson, David E. Fabricating amorphous silicon solar cells by varying the temperature _of the substrate during deposition of the amorphous silicon layer. United States: N. p., 1982.
Web.
Carlson, David E. Fabricating amorphous silicon solar cells by varying the temperature _of the substrate during deposition of the amorphous silicon layer. United States.
Carlson, David E. Fri .
"Fabricating amorphous silicon solar cells by varying the temperature _of the substrate during deposition of the amorphous silicon layer". United States. https://www.osti.gov/servlets/purl/864267.
@article{osti_864267,
title = {Fabricating amorphous silicon solar cells by varying the temperature _of the substrate during deposition of the amorphous silicon layer},
author = {Carlson, David E},
abstractNote = {An improved process for fabricating amorphous silicon solar cells in which the temperature of the substrate is varied during the deposition of the amorphous silicon layer is described. Solar cells manufactured in accordance with this process are shown to have increased efficiencies and fill factors when compared to solar cells manufactured with a constant substrate temperature during deposition of the amorphous silicon layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1982},
month = {1}
}
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