Chemical vapor deposition of sialon

Landingham, Richard L; Casey, Alton W

Title: Chemical vapor deposition of sialon

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Abstract

A laminated composite and a method for forming the composite by chemical vapor deposition. The composite includes a layer of sialon and a material to which the layer is bonded. The method includes the steps of exposing a surface of the material to an ammonia containing atmosphere; heating the surface to at least about 1200.degree. C.; and impinging a gas containing in a flowing atmosphere of air N.sub.2, SiCl.sub.4, and AlCl.sub.3 on the surface.

Inventors:

Landingham, Richard L ^[1]; Casey, Alton W ^[1]

Livermore, CA

Issue Date:: 1982-01-01

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

OSTI Identifier:: 864253

Patent Number(s):: 4336304

Assignee:: United States of America as represented by United States (Washington, DC)

Patent Classifications (CPCs):: C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

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C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
C04B41/5067 - {Silicon oxynitrides, e.g. SIALON}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/265 - 1 mil or less

C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
C04B41/009 - {characterised by the material treated}

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/308 - {Oxynitrides}

C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
C04B41/4529 - {applied from the gas phase}
C04B35/584 - based on silicon nitride
C04B35/522 - {Graphite
C04B41/87 - Ceramics

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/31663 - As siloxane, silicone or silane
Y10T428/30 - Self-sustaining carbon mass or layer with impregnant or other layer

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Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: chemical; vapor; deposition; sialon; laminated; composite; method; forming; layer; material; bonded; steps; exposing; surface; ammonia; containing; atmosphere; heating; 1200; degree; impinging; gas; flowing; air; sicl; alcl; laminated composite; gas containing; chemical vapor; vapor deposition; containing atmosphere; /428/219/427/501/

Citation Formats


                    Landingham, Richard L, and Casey, Alton W. Chemical vapor deposition of sialon.  United States: N. p., 1982. 
        Web.

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                    Landingham, Richard L, & Casey, Alton W. Chemical vapor deposition of sialon.  United States.

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                    Landingham, Richard L, and Casey, Alton W. Fri .  
        "Chemical vapor deposition of sialon".  United States.  https://www.osti.gov/servlets/purl/864253.

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@article{osti_864253,

  title        = {Chemical vapor deposition of sialon},

  author       = {Landingham, Richard L and Casey, Alton W},

  abstractNote = {A laminated composite and a method for forming the composite by chemical vapor deposition. The composite includes a layer of sialon and a material to which the layer is bonded. The method includes the steps of exposing a surface of the material to an ammonia containing atmosphere; heating the surface to at least about 1200.degree. C.; and impinging a gas containing in a flowing atmosphere of air N.sub.2, SiCl.sub.4, and AlCl.sub.3 on the surface.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1982},

  month        = {1}

}

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