Dual surface interferometer
Abstract
A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarter-wave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.
- Inventors:
-
- Knoxville, TN
- Oak Ridge, TN
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 864236
- Patent Number(s):
- 4334778
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- dual; surface; interferometer; double-pass; provided; allows; direct; measurement; relative; displacement; opposed; surfaces; conventional; plane; mirror; modified; replacing; beam-measuring; path; cube-corner; reflector; additional; quarter-wave; plate; beam; altered; extend; mirrored; reflected; placed; interference; retained; reference; split; dual-beam; source; retroreflected; mounted; stationary; housing; permits; laser; interferometry; doubling; resolution; mirror surfaces; direct measurement; opposed surfaces; plane mirror; reference beam; beam source; beam path; reflected beam; mirror surface; opposed surface; direct measure; permits direct; laser interferometer; mirrored surface; wave plate; /356/
Citation Formats
Pardue, Robert M, and Williams, Richard R. Dual surface interferometer. United States: N. p., 1982.
Web.
Pardue, Robert M, & Williams, Richard R. Dual surface interferometer. United States.
Pardue, Robert M, and Williams, Richard R. Fri .
"Dual surface interferometer". United States. https://www.osti.gov/servlets/purl/864236.
@article{osti_864236,
title = {Dual surface interferometer},
author = {Pardue, Robert M and Williams, Richard R},
abstractNote = {A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarter-wave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1982},
month = {Fri Jan 01 00:00:00 EST 1982}
}