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Title: Method for fabricating thin films of pyrolytic carbon

Abstract

The present invention relates to a method for fabricating ultra-thin films of pyrolytic carbon. Pyrolytic carbon is vapor deposited onto a concave surface of a heated substrate to a total uniform thickness in the range of about 0.1 to 1.0 micrometer. The carbon film on the substrate is provided with a layer of adherent polymeric resin. The resulting composite film of pyrolytic carbon and polymeric resin is then easily separated from the substrate by shrinking the polymeric resin coating with thermally induced forces.

Inventors:
 [1];  [2];  [3]
  1. (Lenoir City, TN)
  2. (Oak Ridge, TN)
  3. (Amherst, NY)
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN
OSTI Identifier:
864228
Patent Number(s):
4332751
Assignee:
United States of America as represented by United States (Washington, DC) ORNL
DOE Contract Number:  
W-7405-ENG-26
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; fabricating; films; pyrolytic; carbon; relates; ultra-thin; vapor; deposited; concave; surface; heated; substrate; total; uniform; thickness; range; micrometer; film; provided; layer; adherent; polymeric; resin; resulting; composite; easily; separated; shrinking; coating; thermally; induced; forces; resulting composite; polymeric resin; thermally induced; pyrolytic carbon; vapor deposited; uniform thickness; carbon film; heated substrate; concave surface; easily separated; composite film; ultra-thin films; /264/

Citation Formats

Brassell, Gilbert W., Lewis, Jr., John, and Weber, Gary W. Method for fabricating thin films of pyrolytic carbon. United States: N. p., 1982. Web.
Brassell, Gilbert W., Lewis, Jr., John, & Weber, Gary W. Method for fabricating thin films of pyrolytic carbon. United States.
Brassell, Gilbert W., Lewis, Jr., John, and Weber, Gary W. Fri . "Method for fabricating thin films of pyrolytic carbon". United States. https://www.osti.gov/servlets/purl/864228.
@article{osti_864228,
title = {Method for fabricating thin films of pyrolytic carbon},
author = {Brassell, Gilbert W. and Lewis, Jr., John and Weber, Gary W.},
abstractNote = {The present invention relates to a method for fabricating ultra-thin films of pyrolytic carbon. Pyrolytic carbon is vapor deposited onto a concave surface of a heated substrate to a total uniform thickness in the range of about 0.1 to 1.0 micrometer. The carbon film on the substrate is provided with a layer of adherent polymeric resin. The resulting composite film of pyrolytic carbon and polymeric resin is then easily separated from the substrate by shrinking the polymeric resin coating with thermally induced forces.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1982},
month = {1}
}

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