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Title: Excimer laser with fluoropolymer lining

Abstract

A cavity formed of Teflon to provide extended static fill lifetimes for gases containing halogens. A double cavity configuration provides structural integrity to the inner Teflon cavity by maintaining an identical multi-atmospheric pressure within the outer structural cavity to minimize tension on the Teflon inner cavity. Use of a quantity of the lasing gas in the outer cavity or a constituent of that gas minimizes contamination of the lasing gas.

Inventors:
 [1]
  1. (Santa Fe, NM)
Issue Date:
Research Org.:
Los Alamos National Laboratory (LANL), Los Alamos, NM
OSTI Identifier:
864147
Patent Number(s):
4318056
Assignee:
United States of America as represented by United States (Washington, DC) LANL
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
excimer; laser; fluoropolymer; lining; cavity; formed; teflon; provide; extended; static; fill; lifetimes; gases; containing; halogens; double; configuration; provides; structural; integrity; inner; maintaining; identical; multi-atmospheric; pressure; outer; minimize; tension; quantity; lasing; gas; constituent; minimizes; contamination; cavity configuration; configuration provides; atmospheric pressure; structural integrity; excimer laser; cavity formed; provides structural; gases containing; provide extended; /372/206/220/359/

Citation Formats

Sze, Robert C. Excimer laser with fluoropolymer lining. United States: N. p., 1982. Web.
Sze, Robert C. Excimer laser with fluoropolymer lining. United States.
Sze, Robert C. Fri . "Excimer laser with fluoropolymer lining". United States. https://www.osti.gov/servlets/purl/864147.
@article{osti_864147,
title = {Excimer laser with fluoropolymer lining},
author = {Sze, Robert C.},
abstractNote = {A cavity formed of Teflon to provide extended static fill lifetimes for gases containing halogens. A double cavity configuration provides structural integrity to the inner Teflon cavity by maintaining an identical multi-atmospheric pressure within the outer structural cavity to minimize tension on the Teflon inner cavity. Use of a quantity of the lasing gas in the outer cavity or a constituent of that gas minimizes contamination of the lasing gas.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1982},
month = {1}
}

Patent:

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