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Title: Sextupole system for the correction of spherical aberration

Abstract

A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.

Inventors:
 [1];  [2]
  1. Palos Park, IL
  2. Chicago, IL
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
OSTI Identifier:
864063
Patent Number(s):
4303864
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
EY-76-S-02-2398
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
sextupole; correction; spherical; aberration; means; provided; compensating; charged; particle; beam; devices; positioned; focusing; lenses; focusing lens; particle beam; charged particle; beam devices; spherical aberration; focusing lenses; beam device; /250/313/376/

Citation Formats

Crewe, Albert V, and Kopf, David A. Sextupole system for the correction of spherical aberration. United States: N. p., 1981. Web.
Crewe, Albert V, & Kopf, David A. Sextupole system for the correction of spherical aberration. United States.
Crewe, Albert V, and Kopf, David A. Thu . "Sextupole system for the correction of spherical aberration". United States. https://www.osti.gov/servlets/purl/864063.
@article{osti_864063,
title = {Sextupole system for the correction of spherical aberration},
author = {Crewe, Albert V and Kopf, David A},
abstractNote = {A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1981},
month = {1}
}