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Title: Sputter coating of microspherical substrates by levitation

Abstract

Microspheres are substantially uniformly coated with metals or nonmetals by simultaneously levitating them and sputter coating them at total chamber pressures less than 1 torr. A collimated hole structure 12 comprising a parallel array of upwardly projecting individual gas outlets 16 is machined out to form a dimple 11. Glass microballoons, which are particularly useful in laser fusion applications, can be substantially uniformly coated using the coating method and apparatus.

Inventors:
 [1];  [2]
  1. Tempe, AZ
  2. Los Alamos, NM
Issue Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
OSTI Identifier:
864054
Patent Number(s):
4302311
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
sputter; coating; microspherical; substrates; levitation; microspheres; substantially; uniformly; coated; metals; nonmetals; simultaneously; levitating; total; chamber; pressures; torr; collimated; structure; 12; comprising; parallel; array; upwardly; projecting; individual; gas; outlets; 16; machined; form; dimple; 11; glass; microballoons; particularly; useful; laser; fusion; applications; method; apparatus; uniformly coated; coating method; individual gas; substantially uniformly; gas outlet; particularly useful; substantially uniform; laser fusion; sputter coating; parallel array; chamber pressure; fusion applications; /204/428/

Citation Formats

Lowe, Arthur T, and Hosford, Charles D. Sputter coating of microspherical substrates by levitation. United States: N. p., 1981. Web.
Lowe, Arthur T, & Hosford, Charles D. Sputter coating of microspherical substrates by levitation. United States.
Lowe, Arthur T, and Hosford, Charles D. Thu . "Sputter coating of microspherical substrates by levitation". United States. https://www.osti.gov/servlets/purl/864054.
@article{osti_864054,
title = {Sputter coating of microspherical substrates by levitation},
author = {Lowe, Arthur T and Hosford, Charles D},
abstractNote = {Microspheres are substantially uniformly coated with metals or nonmetals by simultaneously levitating them and sputter coating them at total chamber pressures less than 1 torr. A collimated hole structure 12 comprising a parallel array of upwardly projecting individual gas outlets 16 is machined out to form a dimple 11. Glass microballoons, which are particularly useful in laser fusion applications, can be substantially uniformly coated using the coating method and apparatus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1981},
month = {1}
}