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Title: Cryopump

Abstract

A cryopump having a cryopanel adapted for being cooled by a first refrigerant and shielded from radiation incident thereon by shields adapted for being cooled with a second refrigerant is disclosed. The cryopanel and the radiation shield are fabricated with a first material having high thermal conductivity, such as aluminum, while means for distributing refrigerant from refrigerant dewars to the cryopanel and shields are made of a second material, such as stainless steel. The stainless steel and aluminum sections are connected by an aluminum-steel transition connector adapted for providing vacuum tight connections at cryogenic temperatures. Both the cryopanel and chevrons comprising the shields are fabricated and extruded aluminum with coolant passages formed therein. Thermal distortions during operation are compensated by the use of stainless steel bellows within refrigerant distribution lines. Additionally the refrigerant distribution lines are utilized to suspend the cryopanel and shields within an evacuated environment of the cryopump.

Inventors:
 [1]
  1. (Ellington, CT)
Issue Date:
Research Org.:
United Technologies Research Center, East Hartford, CT (USA)
OSTI Identifier:
863595
Patent Number(s):
4207746
Assignee:
United Technologies Corporation (Hartford, CT) OSTI
DOE Contract Number:  
EY-76-C-02-2277
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
cryopump; cryopanel; adapted; cooled; refrigerant; shielded; radiation; incident; thereon; shields; disclosed; shield; fabricated; material; thermal; conductivity; aluminum; means; distributing; dewars; stainless; steel; sections; connected; aluminum-steel; transition; connector; providing; vacuum; tight; connections; cryogenic; temperatures; chevrons; comprising; extruded; coolant; passages; formed; therein; distortions; operation; compensated; bellows; distribution; lines; additionally; utilized; suspend; evacuated; environment; passages formed; cryogenic temperature; cryogenic temperatures; formed therein; radiation shield; thermal conductivity; stainless steel; radiation incident; coolant passages; distribution lines; coolant passage; vacuum tight; incident thereon; thermal distortion; evacuated environment; distribution line; /62/417/

Citation Formats

McFarlin, David J. Cryopump. United States: N. p., 1980. Web.
McFarlin, David J. Cryopump. United States.
McFarlin, David J. Tue . "Cryopump". United States. https://www.osti.gov/servlets/purl/863595.
@article{osti_863595,
title = {Cryopump},
author = {McFarlin, David J.},
abstractNote = {A cryopump having a cryopanel adapted for being cooled by a first refrigerant and shielded from radiation incident thereon by shields adapted for being cooled with a second refrigerant is disclosed. The cryopanel and the radiation shield are fabricated with a first material having high thermal conductivity, such as aluminum, while means for distributing refrigerant from refrigerant dewars to the cryopanel and shields are made of a second material, such as stainless steel. The stainless steel and aluminum sections are connected by an aluminum-steel transition connector adapted for providing vacuum tight connections at cryogenic temperatures. Both the cryopanel and chevrons comprising the shields are fabricated and extruded aluminum with coolant passages formed therein. Thermal distortions during operation are compensated by the use of stainless steel bellows within refrigerant distribution lines. Additionally the refrigerant distribution lines are utilized to suspend the cryopanel and shields within an evacuated environment of the cryopump.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1980},
month = {1}
}

Patent:

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