Microinterferometer transducer
Abstract
An air-bearing microinterferometer transducer is provided for increased accuracy, range and linearity over conventional displacement transducers. A microinterferometer system is housed within a small compartment of an air-bearing displacement transducer housing. A movable cube corner reflector of the interferometer is mounted to move with the displacement gauging probe of the transducer. The probe is disposed for axial displacement by means of an air-bearing. Light from a single frequency laser is directed into an interferometer system within the transducer housing by means of a self-focusing fiber optic cable to maintain light coherency. Separate fringe patterns are monitored by a pair of fiber optic cables which transmit the patterns to a detecting system. The detecting system includes a bidirectional counter which counts the light pattern fringes according to the direction of movement of the probe during a displacement gauging operation.
- Inventors:
-
- (Oak Ridge, TN)
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 863348
- Patent Number(s):
- 4153370
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
- DOE Contract Number:
- W-7405-ENG-26
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- microinterferometer; transducer; air-bearing; provided; increased; accuracy; range; linearity; conventional; displacement; transducers; housed; compartment; housing; movable; cube; corner; reflector; interferometer; mounted; move; gauging; probe; disposed; axial; means; light; single; frequency; laser; directed; self-focusing; fiber; optic; cable; maintain; coherency; separate; fringe; patterns; monitored; pair; cables; transmit; detecting; bidirectional; counter; counts; pattern; fringes; according; direction; movement; operation; light pattern; axial displacement; fiber optic; optic cable; fringe pattern; optic cables; single frequency; increased accuracy; frequency laser; microinterferometer transducer; displacement transducer; /356/
Citation Formats
Corey, III, Harry S. Microinterferometer transducer. United States: N. p., 1979.
Web.
Corey, III, Harry S. Microinterferometer transducer. United States.
Corey, III, Harry S. Mon .
"Microinterferometer transducer". United States. https://www.osti.gov/servlets/purl/863348.
@article{osti_863348,
title = {Microinterferometer transducer},
author = {Corey, III, Harry S.},
abstractNote = {An air-bearing microinterferometer transducer is provided for increased accuracy, range and linearity over conventional displacement transducers. A microinterferometer system is housed within a small compartment of an air-bearing displacement transducer housing. A movable cube corner reflector of the interferometer is mounted to move with the displacement gauging probe of the transducer. The probe is disposed for axial displacement by means of an air-bearing. Light from a single frequency laser is directed into an interferometer system within the transducer housing by means of a self-focusing fiber optic cable to maintain light coherency. Separate fringe patterns are monitored by a pair of fiber optic cables which transmit the patterns to a detecting system. The detecting system includes a bidirectional counter which counts the light pattern fringes according to the direction of movement of the probe during a displacement gauging operation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1979},
month = {1}
}