skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Double deflection system for an electron beam device

Abstract

A double deflection scanning system for electron beam instruments is provided embodying a means of correcting isotropic coma, and anisotropic coma aberrations induced by the magnetic lens of such an instrument. The scanning system deflects the beam prior to entry into the magnetic lens from the normal on-axis intersection of the beam with the lens according to predetermined formulas and thereby reduces the aberrations.

Inventors:
 [1];  [1];  [2]
  1. Chicago, IL
  2. Palos Park, IL
Issue Date:
OSTI Identifier:
863136
Patent Number(s):
4101813
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H - ELECTRICITY H04 - ELECTRIC COMMUNICATION TECHNIQUE H04N - PICTORIAL COMMUNICATION, e.g. TELEVISION
DOE Contract Number:  
E(11-1)-2398
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
double; deflection; electron; beam; device; scanning; instruments; provided; embodying; means; correcting; isotropic; coma; anisotropic; aberrations; induced; magnetic; lens; instrument; deflects; prior; entry; normal; on-axis; intersection; according; predetermined; formulas; reduces; magnetic lens; electron beam; aberrations induced; beam device; double deflection; /315/250/

Citation Formats

Parker, Norman W, Golladay, Steven D, and Crewe, Albert V. Double deflection system for an electron beam device. United States: N. p., 1978. Web.
Parker, Norman W, Golladay, Steven D, & Crewe, Albert V. Double deflection system for an electron beam device. United States.
Parker, Norman W, Golladay, Steven D, and Crewe, Albert V. Sun . "Double deflection system for an electron beam device". United States. https://www.osti.gov/servlets/purl/863136.
@article{osti_863136,
title = {Double deflection system for an electron beam device},
author = {Parker, Norman W and Golladay, Steven D and Crewe, Albert V},
abstractNote = {A double deflection scanning system for electron beam instruments is provided embodying a means of correcting isotropic coma, and anisotropic coma aberrations induced by the magnetic lens of such an instrument. The scanning system deflects the beam prior to entry into the magnetic lens from the normal on-axis intersection of the beam with the lens according to predetermined formulas and thereby reduces the aberrations.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1978},
month = {1}
}

Patent:

Save / Share: