Variable orifice using an iris shutter
Abstract
A variable orifice forming mechanism utilizing an iris shutter arrangement adapted to control gas flow, conductance in vacuum systems, as a heat shield for furnace windows, as a beam shutter in sputtering operations, and in any other application requiring periodic or continuously-variable control of material, gas, or fluid flow.
- Inventors:
-
- El Cerrito, CA
- Fremont, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 863108
- Patent Number(s):
- 4094492
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16K - VALVES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- variable; orifice; iris; shutter; forming; mechanism; utilizing; arrangement; adapted; control; gas; flow; conductance; vacuum; systems; heat; shield; furnace; windows; beam; sputtering; operations; application; requiring; periodic; continuously-variable; material; fluid; vacuum systems; control gas; gas flow; fluid flow; heat shield; variable orifice; shutter arrangement; mechanism utilizing; variable control; iris shutter; /251/138/
Citation Formats
Beeman, Raymond, and Brajkovich, Steven J. Variable orifice using an iris shutter. United States: N. p., 1978.
Web.
Beeman, Raymond, & Brajkovich, Steven J. Variable orifice using an iris shutter. United States.
Beeman, Raymond, and Brajkovich, Steven J. Sun .
"Variable orifice using an iris shutter". United States. https://www.osti.gov/servlets/purl/863108.
@article{osti_863108,
title = {Variable orifice using an iris shutter},
author = {Beeman, Raymond and Brajkovich, Steven J},
abstractNote = {A variable orifice forming mechanism utilizing an iris shutter arrangement adapted to control gas flow, conductance in vacuum systems, as a heat shield for furnace windows, as a beam shutter in sputtering operations, and in any other application requiring periodic or continuously-variable control of material, gas, or fluid flow.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1978},
month = {1}
}
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