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Title: Micron-Scale Differential Scanning Calorimeter on a Chip

Abstract

A differential scanning microcalorimeter produced on a silicon chip enables microscopic scanning calorimetry measurements of small samples and thin films. The chip may be fabricated using standard CMOS processes. The microcalorimeter includes a reference zone and a sample zone. The reference and sample zones may be at opposite ends of a suspended platform or may reside on separate platforms. An integrated polysilicon heater provides heat to each zone. A thermopile consisting of a succession of thermocouple junctions generates a voltage representing the temperature difference between the reference and sample zones. Temperature differences between the zones provide information about the chemical reactions and phase transitions that occur in a sample placed in the sample zone.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
National Institute of Standards and Technology, Gaithersburg, MD (US)
Sponsoring Org.:
USDOE Office of Environmental Management (EM) (US)
OSTI Identifier:
827540
Patent Number(s):
6,079,873
Application Number:
R&D Project: EMSP 65421; 09/107,064; 107064; TRN: US200426%%27
Assignee:
DOEEMSP
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 30 Jun 1998
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; CALORIMETERS; DESIGN; MINIATURIZATION

Citation Formats

Cavicchi, Richard E, Poirier, Gregory Ernest, Suehle, John S, Gaitan, Michael, and Tea, Nim H. Micron-Scale Differential Scanning Calorimeter on a Chip. United States: N. p., 1998. Web.
Cavicchi, Richard E, Poirier, Gregory Ernest, Suehle, John S, Gaitan, Michael, & Tea, Nim H. Micron-Scale Differential Scanning Calorimeter on a Chip. United States.
Cavicchi, Richard E, Poirier, Gregory Ernest, Suehle, John S, Gaitan, Michael, and Tea, Nim H. Tue . "Micron-Scale Differential Scanning Calorimeter on a Chip". United States. https://www.osti.gov/servlets/purl/827540.
@article{osti_827540,
title = {Micron-Scale Differential Scanning Calorimeter on a Chip},
author = {Cavicchi, Richard E and Poirier, Gregory Ernest and Suehle, John S and Gaitan, Michael and Tea, Nim H},
abstractNote = {A differential scanning microcalorimeter produced on a silicon chip enables microscopic scanning calorimetry measurements of small samples and thin films. The chip may be fabricated using standard CMOS processes. The microcalorimeter includes a reference zone and a sample zone. The reference and sample zones may be at opposite ends of a suspended platform or may reside on separate platforms. An integrated polysilicon heater provides heat to each zone. A thermopile consisting of a succession of thermocouple junctions generates a voltage representing the temperature difference between the reference and sample zones. Temperature differences between the zones provide information about the chemical reactions and phase transitions that occur in a sample placed in the sample zone.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {6}
}

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