High resolution amorphous silicon radiation detectors
Abstract
A radiation detector employing amorphous Si:H cells in an array with each detector cell having at least three contiguous layers (n-type, intrinsic, p-type), positioned between two electrodes to which a bias voltage is applied. An energy conversion layer atop the silicon cells intercepts incident radiation and converts radiation energy to light energy of a wavelength to which the silicon cells are responsive. A read-out device, positioned proximate to each detector element in an array allows each such element to be interrogated independently to determine whether radiation has been detected in that cell. The energy conversion material may be a layer of luminescent material having a columnar structure. In one embodiment a column of luminescent material detects the passage therethrough of radiation to be detected and directs a light beam signal to an adjacent a-Si:H film so that detection may be confined to one or more such cells in the array. One or both electrodes may have a comb structure, and the teeth of each electrode comb may be interdigitated for capacitance reduction. The amorphous Si:H film may be replaced by an amorphous Si:Ge:H film in which up to 40 percent of the amorphous material is Ge. Two dimensional arrays maymore »
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7273425
- Patent Number(s):
- 5117114
- Application Number:
- PPN: US 7-448240
- Assignee:
- Univ. of California, Oakland, CA (United States)
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 11 Dec 1989
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; SI SEMICONDUCTOR DETECTORS; DESIGN; GERMANIUM; N-TYPE CONDUCTORS; P-TYPE CONDUCTORS; READOUT SYSTEMS; SILICON; USES; ELEMENTS; MATERIALS; MEASURING INSTRUMENTS; METALS; RADIATION DETECTORS; SEMICONDUCTOR DETECTORS; SEMICONDUCTOR MATERIALS; SEMIMETALS; 440101* - Radiation Instrumentation- General Detectors or Monitors & Radiometric Instruments
Citation Formats
Street, R A, Kaplan, S N, and Perez-Mendez, V. High resolution amorphous silicon radiation detectors. United States: N. p., 1992.
Web.
Street, R A, Kaplan, S N, & Perez-Mendez, V. High resolution amorphous silicon radiation detectors. United States.
Street, R A, Kaplan, S N, and Perez-Mendez, V. Tue .
"High resolution amorphous silicon radiation detectors". United States.
@article{osti_7273425,
title = {High resolution amorphous silicon radiation detectors},
author = {Street, R A and Kaplan, S N and Perez-Mendez, V},
abstractNote = {A radiation detector employing amorphous Si:H cells in an array with each detector cell having at least three contiguous layers (n-type, intrinsic, p-type), positioned between two electrodes to which a bias voltage is applied. An energy conversion layer atop the silicon cells intercepts incident radiation and converts radiation energy to light energy of a wavelength to which the silicon cells are responsive. A read-out device, positioned proximate to each detector element in an array allows each such element to be interrogated independently to determine whether radiation has been detected in that cell. The energy conversion material may be a layer of luminescent material having a columnar structure. In one embodiment a column of luminescent material detects the passage therethrough of radiation to be detected and directs a light beam signal to an adjacent a-Si:H film so that detection may be confined to one or more such cells in the array. One or both electrodes may have a comb structure, and the teeth of each electrode comb may be interdigitated for capacitance reduction. The amorphous Si:H film may be replaced by an amorphous Si:Ge:H film in which up to 40 percent of the amorphous material is Ge. Two dimensional arrays may be used in X-ray imaging, CT scanning, crystallography, high energy physics beam tracking, nuclear medicine cameras and autoradiography. 18 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 26 00:00:00 EDT 1992},
month = {Tue May 26 00:00:00 EDT 1992}
}