Continuous cryopump with a device for regenerating the cryosurface
Abstract
A high throughput continuous cryopump is provided. The cryopump incorporates an improved method for regenerating the cryopumping surface while the pump is in continuous operation. The regeneration of the cryopumping surface does not thermally cycle the pump, and to this end a small chamber connected to a secondary pumping source serves to contain and exhaust frost removed from the cryopumping surface during such regeneration. The frost is exhausted at a rate substantially independent of the speed of the cryopump which enhances the capability of the pump to achieve a high compression ratio and allow the pump to operate continuously while the cryopumping surface is being regenerated. 8 figs.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7271928
- Patent Number(s):
- 4724677
- Application Number:
- PPN: US 6-917197
- Assignee:
- PTO; EDB-94-119437
- DOE Contract Number:
- W-7405-ENG-26
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 9 Oct 1986
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CRYOPUMPS; DESIGN; FROST; PERFORMANCE; REGENERATION; REMOVAL; EQUIPMENT; ICE; LABORATORY EQUIPMENT; PUMPS; VACUUM PUMPS; 661210* - Cryogenics- (1992-)
Citation Formats
Foster, C A. Continuous cryopump with a device for regenerating the cryosurface. United States: N. p., 1988.
Web.
Foster, C A. Continuous cryopump with a device for regenerating the cryosurface. United States.
Foster, C A. Tue .
"Continuous cryopump with a device for regenerating the cryosurface". United States.
@article{osti_7271928,
title = {Continuous cryopump with a device for regenerating the cryosurface},
author = {Foster, C A},
abstractNote = {A high throughput continuous cryopump is provided. The cryopump incorporates an improved method for regenerating the cryopumping surface while the pump is in continuous operation. The regeneration of the cryopumping surface does not thermally cycle the pump, and to this end a small chamber connected to a secondary pumping source serves to contain and exhaust frost removed from the cryopumping surface during such regeneration. The frost is exhausted at a rate substantially independent of the speed of the cryopump which enhances the capability of the pump to achieve a high compression ratio and allow the pump to operate continuously while the cryopumping surface is being regenerated. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1988},
month = {2}
}
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