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Title: Continuous cryopump with a device for regenerating the cryosurface

Abstract

A high throughput continuous cryopump is provided. The cryopump incorporates an improved method for regenerating the cryopumping surface while the pump is in continuous operation. The regeneration of the cryopumping surface does not thermally cycle the pump, and to this end a small chamber connected to a secondary pumping source serves to contain and exhaust frost removed from the cryopumping surface during such regeneration. The frost is exhausted at a rate substantially independent of the speed of the cryopump which enhances the capability of the pump to achieve a high compression ratio and allow the pump to operate continuously while the cryopumping surface is being regenerated. 8 figs.

Inventors:
Issue Date:
OSTI Identifier:
7271928
Patent Number(s):
4724677
Application Number:
PPN: US 6-917197
Assignee:
PTO; EDB-94-119437
DOE Contract Number:  
W-7405-ENG-26
Resource Type:
Patent
Resource Relation:
Patent File Date: 9 Oct 1986
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CRYOPUMPS; DESIGN; FROST; PERFORMANCE; REGENERATION; REMOVAL; EQUIPMENT; ICE; LABORATORY EQUIPMENT; PUMPS; VACUUM PUMPS; 661210* - Cryogenics- (1992-)

Citation Formats

Foster, C A. Continuous cryopump with a device for regenerating the cryosurface. United States: N. p., 1988. Web.
Foster, C A. Continuous cryopump with a device for regenerating the cryosurface. United States.
Foster, C A. Tue . "Continuous cryopump with a device for regenerating the cryosurface". United States.
@article{osti_7271928,
title = {Continuous cryopump with a device for regenerating the cryosurface},
author = {Foster, C A},
abstractNote = {A high throughput continuous cryopump is provided. The cryopump incorporates an improved method for regenerating the cryopumping surface while the pump is in continuous operation. The regeneration of the cryopumping surface does not thermally cycle the pump, and to this end a small chamber connected to a secondary pumping source serves to contain and exhaust frost removed from the cryopumping surface during such regeneration. The frost is exhausted at a rate substantially independent of the speed of the cryopump which enhances the capability of the pump to achieve a high compression ratio and allow the pump to operate continuously while the cryopumping surface is being regenerated. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1988},
month = {2}
}