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Title: Graphoepitaxy by encapsulation

Abstract

Improvements on the graphoepitaxial process for obtaining epitaxial or preferred orientation films are described wherein a cap of material is formed over the film to be oriented, artificial surface-relief structure may be present in the substrate, the cap, or both, and the film may be heated by irradiation with electromagnetic radiation. 13 figs.

Inventors:
; ; ;
Issue Date:
Research Org.:
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
OSTI Identifier:
7249381
Patent Number(s):
4565599
Application Number:
CNN: AF19(628)-80-C-0002; PPN: US 6-680237
Assignee:
Massachusetts Inst. of Tech., Cambridge, MA (United States)
DOE Contract Number:  
AC02-80ER10179
Resource Type:
Patent
Resource Relation:
Patent File Date: 10 Dec 1984
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; FILMS; EPITAXY; ENCAPSULATION; HEATING; SUBSTRATES; 360101* - Metals & Alloys- Preparation & Fabrication; 360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360601 - Other Materials- Preparation & Manufacture

Citation Formats

Geis, M W, Smith, H I, Antoniadis, D A, and Flanders, D C. Graphoepitaxy by encapsulation. United States: N. p., 1986. Web.
Geis, M W, Smith, H I, Antoniadis, D A, & Flanders, D C. Graphoepitaxy by encapsulation. United States.
Geis, M W, Smith, H I, Antoniadis, D A, and Flanders, D C. Tue . "Graphoepitaxy by encapsulation". United States.
@article{osti_7249381,
title = {Graphoepitaxy by encapsulation},
author = {Geis, M W and Smith, H I and Antoniadis, D A and Flanders, D C},
abstractNote = {Improvements on the graphoepitaxial process for obtaining epitaxial or preferred orientation films are described wherein a cap of material is formed over the film to be oriented, artificial surface-relief structure may be present in the substrate, the cap, or both, and the film may be heated by irradiation with electromagnetic radiation. 13 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1986},
month = {1}
}