Graphoepitaxy by encapsulation
Abstract
Improvements on the graphoepitaxial process for obtaining epitaxial or preferred orientation films are described wherein a cap of material is formed over the film to be oriented, artificial surface-relief structure may be present in the substrate, the cap, or both, and the film may be heated by irradiation with electromagnetic radiation. 13 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
- OSTI Identifier:
- 7249381
- Patent Number(s):
- 4565599
- Application Number:
- CNN: AF19(628)-80-C-0002; PPN: US 6-680237
- Assignee:
- Massachusetts Inst. of Tech., Cambridge, MA (United States)
- DOE Contract Number:
- AC02-80ER10179
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 10 Dec 1984
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; FILMS; EPITAXY; ENCAPSULATION; HEATING; SUBSTRATES; 360101* - Metals & Alloys- Preparation & Fabrication; 360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360601 - Other Materials- Preparation & Manufacture
Citation Formats
Geis, M W, Smith, H I, Antoniadis, D A, and Flanders, D C. Graphoepitaxy by encapsulation. United States: N. p., 1986.
Web.
Geis, M W, Smith, H I, Antoniadis, D A, & Flanders, D C. Graphoepitaxy by encapsulation. United States.
Geis, M W, Smith, H I, Antoniadis, D A, and Flanders, D C. Tue .
"Graphoepitaxy by encapsulation". United States.
@article{osti_7249381,
title = {Graphoepitaxy by encapsulation},
author = {Geis, M W and Smith, H I and Antoniadis, D A and Flanders, D C},
abstractNote = {Improvements on the graphoepitaxial process for obtaining epitaxial or preferred orientation films are described wherein a cap of material is formed over the film to be oriented, artificial surface-relief structure may be present in the substrate, the cap, or both, and the film may be heated by irradiation with electromagnetic radiation. 13 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 21 00:00:00 EST 1986},
month = {Tue Jan 21 00:00:00 EST 1986}
}
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