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Title: Orientation filtering for crystalline films

Abstract

A substrate is coated with a film to be recrystallized. A pattern of crystallization barriers is created in the film, for example, by etching voids in the film. An encapsulation layer is generally applied to protect the film, fill the voids and otherwise enhance a recrystallization process. Recrystallization is carried out such that certain orientations pass preferentially through the barrier, generally as a result of growth-velocity anisotropy. The result is a film of a specific predetermined crystallographic orientation, a range of orientations or a set of discrete orientations. 7 figs.

Inventors:
; ; ;
Issue Date:
OSTI Identifier:
7249303
Patent Number(s):
4632723
Application Number:
PPN: US 6-481096
Assignee:
Massachusetts Inst. of Tech., Cambridge, MA (United States)
DOE Contract Number:  
AC02-80ER13019
Resource Type:
Patent
Resource Relation:
Patent File Date: 31 Mar 1983
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; FILMS; RECRYSTALLIZATION; GRAIN ORIENTATION; SUBSTRATES; VOIDS; MICROSTRUCTURE; ORIENTATION; 360102* - Metals & Alloys- Structure & Phase Studies; 360202 - Ceramics, Cermets, & Refractories- Structure & Phase Studies; 360602 - Other Materials- Structure & Phase Studies

Citation Formats

Smith, H I, Atwater, H A, Thompson, C V, and Geis, M W. Orientation filtering for crystalline films. United States: N. p., 1986. Web.
Smith, H I, Atwater, H A, Thompson, C V, & Geis, M W. Orientation filtering for crystalline films. United States.
Smith, H I, Atwater, H A, Thompson, C V, and Geis, M W. Tue . "Orientation filtering for crystalline films". United States.
@article{osti_7249303,
title = {Orientation filtering for crystalline films},
author = {Smith, H I and Atwater, H A and Thompson, C V and Geis, M W},
abstractNote = {A substrate is coated with a film to be recrystallized. A pattern of crystallization barriers is created in the film, for example, by etching voids in the film. An encapsulation layer is generally applied to protect the film, fill the voids and otherwise enhance a recrystallization process. Recrystallization is carried out such that certain orientations pass preferentially through the barrier, generally as a result of growth-velocity anisotropy. The result is a film of a specific predetermined crystallographic orientation, a range of orientations or a set of discrete orientations. 7 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1986},
month = {12}
}