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Title: Vacuum barrier for excimer lasers

Abstract

A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput. 3 figs.

Inventors:
Issue Date:
OSTI Identifier:
7232712
Patent Number(s):
5147711 A
Application Number:
PPN: US 7-596154
Assignee:
Dept. of Energy, Washington, DC (United States) PTO; EDB-94-090247
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Resource Relation:
Patent File Date: 10 Oct 1990
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; EXCIMER LASERS; DESIGN; COMPOSITE MATERIALS; GASES; VACUUM SYSTEMS; FLUIDS; GAS LASERS; LASERS; MATERIALS; 426002* - Engineering- Lasers & Masers- (1990-)

Citation Formats

Shurter, R.P. Vacuum barrier for excimer lasers. United States: N. p., 1992. Web.
Shurter, R.P. Vacuum barrier for excimer lasers. United States.
Shurter, R.P. Tue . "Vacuum barrier for excimer lasers". United States.
@article{osti_7232712,
title = {Vacuum barrier for excimer lasers},
author = {Shurter, R.P.},
abstractNote = {A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1992},
month = {9}
}