Method of producing amorphous thin films
Abstract
Disclosed is a method of producing thin films by sintering which comprises: (a) coating a substrate with a thin film of an inorganic glass forming material possessing the capability of being sintered; and (b) irradiating said thin film of said particulate material with a laser beam of sufficient power to cause sintering of said material below the temperature of liquidus thereof. Also disclosed is the article produced by the method claimed. 4 figs.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7205483
- Patent Number(s):
- 5143533
- Application Number:
- PPN: US 7-748585
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 22 Aug 1991
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; GLASS; SINTERING; THIN FILMS; LASER RADIATION; SUBSTRATES; ELECTROMAGNETIC RADIATION; FABRICATION; FILMS; RADIATIONS; 360601* - Other Materials- Preparation & Manufacture
Citation Formats
Brusasco, R M. Method of producing amorphous thin films. United States: N. p., 1992.
Web.
Brusasco, R M. Method of producing amorphous thin films. United States.
Brusasco, R M. Tue .
"Method of producing amorphous thin films". United States.
@article{osti_7205483,
title = {Method of producing amorphous thin films},
author = {Brusasco, R M},
abstractNote = {Disclosed is a method of producing thin films by sintering which comprises: (a) coating a substrate with a thin film of an inorganic glass forming material possessing the capability of being sintered; and (b) irradiating said thin film of said particulate material with a laser beam of sufficient power to cause sintering of said material below the temperature of liquidus thereof. Also disclosed is the article produced by the method claimed. 4 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1992},
month = {9}
}
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