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Title: Method of chemical vapor deposition of boron nitride using polymeric cyanoborane

Polymeric cyanoborane is volatilized, decomposed by thermal or microwave plasma energy, and deposited on a substrate as an amorphous film containing boron, nitrogen and carbon. Residual carbon present in the film is removed by ammonia treatment at an increased temperature, producing an adherent, essentially stoichiometric boron nitride film. 11 figs.
Inventors:
Issue Date:
OSTI Identifier:
7198508
Assignee:
Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States) PTO; EDB-94-101804
Patent Number(s):
US 5320878; A
Application Number:
PPN: US 7-819688
Contract Number:
AC05-84OR21400
Resource Relation:
Patent File Date: 10 Jan 1992
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; BORON NITRIDES; CHEMICAL VAPOR DEPOSITION; AMORPHOUS STATE; CHEMICAL COMPOSITION; DECOMPOSITION; BORON COMPOUNDS; CHEMICAL COATING; CHEMICAL REACTIONS; DEPOSITION; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SURFACE COATING; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication