Dry texturing of solar cells
Abstract
A textured backside of a semiconductor device for increasing light scattering and absorption in a semiconductor substrate is accomplished by applying infrared radiation to the front side of a semiconductor substrate that has a metal layer deposited on its backside in a time-energy profile that first produces pits in the backside surface and then produces a thin, highly reflective, low resistivity, epitaxial alloy layer over the entire area of the interface between the semiconductor substrate and a metal contact layer. The time-energy profile includes ramping up to a first energy level and holding for a period of time to create the desired pit size and density and then rapidly increasing the energy to a second level in which the entire interface area is melted and alloyed quickly. After holding the second energy level for a sufficient time to develop the thin alloy layer over the entire interface area, the energy is ramped down to allow epitaxial crystal growth in the alloy layer. The result is a textured backside on an optically reflective, low resistivity alloy interface between the semiconductor substrate and the metal electrical contact layer. 9 figs.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7193238
- Patent Number(s):
- 5358574 A
- Application Number:
- PPN: US 8-155385
- Assignee:
- Midwest Research Inst., Kansas City, MO (United States) PTO; EDB-94-165139
- DOE Contract Number:
- AC02-83CH10093
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 22 Nov 1993
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 14 SOLAR ENERGY; REFLECTIVE COATINGS; TEXTURE; SOLAR CELLS; EPITAXY; FABRICATION; LAYERS; OPTIMIZATION; VISIBLE RADIATION; COATINGS; DIRECT ENERGY CONVERTERS; ELECTROMAGNETIC RADIATION; EQUIPMENT; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; RADIATIONS; SOLAR EQUIPMENT; 140501* - Solar Energy Conversion- Photovoltaic Conversion
Citation Formats
Sopori, B.L. Dry texturing of solar cells. United States: N. p., 1994.
Web.
Sopori, B.L. Dry texturing of solar cells. United States.
Sopori, B.L. Tue .
"Dry texturing of solar cells". United States.
@article{osti_7193238,
title = {Dry texturing of solar cells},
author = {Sopori, B.L.},
abstractNote = {A textured backside of a semiconductor device for increasing light scattering and absorption in a semiconductor substrate is accomplished by applying infrared radiation to the front side of a semiconductor substrate that has a metal layer deposited on its backside in a time-energy profile that first produces pits in the backside surface and then produces a thin, highly reflective, low resistivity, epitaxial alloy layer over the entire area of the interface between the semiconductor substrate and a metal contact layer. The time-energy profile includes ramping up to a first energy level and holding for a period of time to create the desired pit size and density and then rapidly increasing the energy to a second level in which the entire interface area is melted and alloyed quickly. After holding the second energy level for a sufficient time to develop the thin alloy layer over the entire interface area, the energy is ramped down to allow epitaxial crystal growth in the alloy layer. The result is a textured backside on an optically reflective, low resistivity alloy interface between the semiconductor substrate and the metal electrical contact layer. 9 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {10}
}