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Title: Photo ion spectrometer

Abstract

A method and apparatus are described for extracting for quantitative analysis ions of selected atomic components of a sample. A lens system is configured to provide a slowly diminishing field region for a volume containing the selected atomic components, enabling accurate energy analysis of ions generated in the slowly diminishing field region. The lens system also enables focusing on a sample of a charged particle beam, such as an ion beam, along a path length perpendicular to the sample and extraction of the charged particles along a path length also perpendicular to the sample. Improvement of signal to noise ratio is achieved by laser excitation of ions to selected auto-ionization states before carrying out quantitative analysis. Accurate energy analysis of energetic charged particles is assured by using a preselected resistive thick film configuration disposed on an insulator substrate for generating predetermined electric field boundary conditions to achieve for analysis the required electric field potential. The spectrometer also is applicable in the fields of SIMS, ISS and electron spectroscopy. 8 figs.

Inventors:
; ;
Issue Date:
OSTI Identifier:
7164556
Patent Number(s):
4855596 A
Application Number:
PPN: US 7-046117
Assignee:
ARCH Development Corp., Chicago, IL (United States) PTO; EDB-94-118382
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Resource Relation:
Patent File Date: 5 May 1987
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; SPECTROMETERS; DESIGN; FOCUSING; ION BEAMS; ION MICROPROBE ANALYSIS; ION SCATTERING ANALYSIS; LENSES; MASS SPECTROSCOPY; OPERATION; QUANTITATIVE CHEMICAL ANALYSIS; BEAMS; CHEMICAL ANALYSIS; MEASURING INSTRUMENTS; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; SPECTROSCOPY; 440800* - Miscellaneous Instrumentation- (1990-)

Citation Formats

Gruen, D.M., Young, C.E., and Pellin, M.J. Photo ion spectrometer. United States: N. p., 1989. Web.
Gruen, D.M., Young, C.E., & Pellin, M.J. Photo ion spectrometer. United States.
Gruen, D.M., Young, C.E., and Pellin, M.J. Tue . "Photo ion spectrometer". United States.
@article{osti_7164556,
title = {Photo ion spectrometer},
author = {Gruen, D.M. and Young, C.E. and Pellin, M.J.},
abstractNote = {A method and apparatus are described for extracting for quantitative analysis ions of selected atomic components of a sample. A lens system is configured to provide a slowly diminishing field region for a volume containing the selected atomic components, enabling accurate energy analysis of ions generated in the slowly diminishing field region. The lens system also enables focusing on a sample of a charged particle beam, such as an ion beam, along a path length perpendicular to the sample and extraction of the charged particles along a path length also perpendicular to the sample. Improvement of signal to noise ratio is achieved by laser excitation of ions to selected auto-ionization states before carrying out quantitative analysis. Accurate energy analysis of energetic charged particles is assured by using a preselected resistive thick film configuration disposed on an insulator substrate for generating predetermined electric field boundary conditions to achieve for analysis the required electric field potential. The spectrometer also is applicable in the fields of SIMS, ISS and electron spectroscopy. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1989},
month = {8}
}