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Title: Method of sputter etching a surface

Abstract

The surface of a target is textured by co-sputter etching the target surface with a seed material adjacent thereto, while the target surface is maintained at a pre-selected temperature. By pre-selecting the temperature of the surface while sputter etching, it is possible to predetermine the reflectance properties of the etched surface. The surface may be textured to absorb sunlight efficiently and have minimal emittance in the infrared region so as to be well-suited for use as a solar absorber for photothermal energy conversion. 4 figs.

Inventors:
Issue Date:
OSTI Identifier:
7157408
Patent Number(s):
4431499 A
Application Number:
PPN: US 6-352738
Assignee:
Dept. of Energy, Washington, DC (United States) PTO; EDB-94-122167
DOE Contract Number:  
AC06-76RL01830
Resource Type:
Patent
Resource Relation:
Patent File Date: 26 Feb 1982
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY; SOLAR ABSORBERS; ETCHING; MATERIALS; SOLAR THERMAL CONVERSION; TEMPERATURE CONTROL; CONTROL; CONVERSION; ENERGY CONVERSION; EQUIPMENT; SOLAR ENERGY CONVERSION; SOLAR EQUIPMENT; SURFACE FINISHING; 140700* - Solar Thermal Power Systems; 140900 - Solar Thermal Utilization

Citation Formats

Henager, C.H. Jr. Method of sputter etching a surface. United States: N. p., 1984. Web.
Henager, C.H. Jr. Method of sputter etching a surface. United States.
Henager, C.H. Jr. Tue . "Method of sputter etching a surface". United States.
@article{osti_7157408,
title = {Method of sputter etching a surface},
author = {Henager, C.H. Jr.},
abstractNote = {The surface of a target is textured by co-sputter etching the target surface with a seed material adjacent thereto, while the target surface is maintained at a pre-selected temperature. By pre-selecting the temperature of the surface while sputter etching, it is possible to predetermine the reflectance properties of the etched surface. The surface may be textured to absorb sunlight efficiently and have minimal emittance in the infrared region so as to be well-suited for use as a solar absorber for photothermal energy conversion. 4 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1984},
month = {2}
}