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Title: Acoustic resonator and method of making same

Abstract

A method is disclosed of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers. 4 figs.

Inventors:
;
Issue Date:
OSTI Identifier:
7146617
Patent Number(s):
4502932
Application Number:
PPN: US 6-541608
Assignee:
Dept. of Energy, Washington, DC (United States)
DOE Contract Number:  
W-7405-ENG-82
Resource Type:
Patent
Resource Relation:
Patent File Date: 13 Oct 1983
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; RESONATORS; FABRICATION; ALUMINIUM ALLOYS; ALUMINIUM NITRIDES; COMPOSITE MATERIALS; GALLIUM ARSENIDES; SOUND WAVES; ALLOYS; ALUMINIUM COMPOUNDS; ARSENIC COMPOUNDS; ARSENIDES; ELECTRONIC EQUIPMENT; EQUIPMENT; GALLIUM COMPOUNDS; MATERIALS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-)

Citation Formats

Kline, G R, and Lakin, K M. Acoustic resonator and method of making same. United States: N. p., 1985. Web.
Kline, G R, & Lakin, K M. Acoustic resonator and method of making same. United States.
Kline, G R, and Lakin, K M. Tue . "Acoustic resonator and method of making same". United States.
@article{osti_7146617,
title = {Acoustic resonator and method of making same},
author = {Kline, G R and Lakin, K M},
abstractNote = {A method is disclosed of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers. 4 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {3}
}