Acoustic microscope surface inspection system and method

Title: Acoustic microscope surface inspection system and method

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Abstract

An acoustic microscope surface inspection system and method are described in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respect to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations. 7 figures.

Inventors:: Khuri-Yakub, B T; Parent, P; Reinholdtsen, P A

Issue Date:: 1991-02-26

OSTI Identifier:: 7084009

Patent Number(s):: 4995259 A

Application Number:: PPN: US 7-320950

Assignee:: Leland Stanford Junior University, Stanford, CA (United States)

DOE Contract Number:: FG03-84ER45157

Resource Type:: Patent

Resource Relation:: Patent File Date: 9 Mar 1989

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; MATERIALS; ACOUSTIC MICROSCOPY; MICROSCOPES; DESIGN; BRITTLENESS; DAMAGE; MACHINING; MATERIALS TESTING; OPERATION; SURFACE PROPERTIES; MECHANICAL PROPERTIES; MICROSCOPY; TESTING; 420500* - Engineering- Materials Testing

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                    Khuri-Yakub, B T, Parent, P, and Reinholdtsen, P A. Acoustic microscope surface inspection system and method.  United States: N. p., 1991. 
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                    Khuri-Yakub, B T, Parent, P, & Reinholdtsen, P A. Acoustic microscope surface inspection system and method.  United States.

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                    Khuri-Yakub, B T, Parent, P, and Reinholdtsen, P A. Tue .  
        "Acoustic microscope surface inspection system and method".  United States.

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@article{osti_7084009,

  title        = {Acoustic microscope surface inspection system and method},

  author       = {Khuri-Yakub, B T and Parent, P and Reinholdtsen, P A},

  abstractNote = {An acoustic microscope surface inspection system and method are described in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respect to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations. 7 figures.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1991},

  month        = {2}

}

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