Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof
Abstract
An oxidation resistant, high temperature thermal cycling resistant coated ceramic article for ceramic heat engine applications is disclosed. The substrate is a silicon-based material, i.e. a silicon nitride- or silicon carbide-based monolithic or composite material. The coating is a graded coating of at least two layers: an intermediate AlN or Al[sub x]N[sub y]O[sub z] layer and an aluminum oxide or zirconium oxide outer layer. The composition of the coating changes gradually from that of the substrate to that of the AlN or Al[sub x]N[sub y]O[sub z] layer and further to the composition of the aluminum oxide or zirconium oxide outer layer. Other layers may be deposited over the aluminum oxide layer. A CVD process for depositing the graded coating on the substrate is also disclosed.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7073544
- Patent Number(s):
- 4950558
- Application Number:
- PPN: US 7-250980
- Assignee:
- GTE Labs. Inc., Waltham, MA (United States)
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 23 Sep 1988
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 33 ADVANCED PROPULSION SYSTEMS; 36 MATERIALS SCIENCE; ALUMINIUM NITRIDES; CHEMICAL VAPOR DEPOSITION; ALUMINIUM OXIDES; COMPOSITE MATERIALS; CORROSION PROTECTION; PROTECTIVE COATINGS; HEAT ENGINES; SILICON CARBIDES; SILICON NITRIDES; ZIRCONIUM OXIDES; CERAMICS; CORROSION RESISTANCE; LAYERS; ALUMINIUM COMPOUNDS; CARBIDES; CARBON COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; COATINGS; DEPOSITION; ENGINES; MATERIALS; NITRIDES; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PNICTIDES; SILICON COMPOUNDS; SURFACE COATING; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS; 330100* - Internal Combustion Engines; 330200 - External Combustion Engines; 360205 - Ceramics, Cermets, & Refractories- Corrosion & Erosion; 360604 - Materials- Corrosion, Erosion, & Degradation
Citation Formats
Sarin, V K. Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof. United States: N. p., 1990.
Web.
Sarin, V K. Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof. United States.
Sarin, V K. Tue .
"Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof". United States.
@article{osti_7073544,
title = {Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof},
author = {Sarin, V K},
abstractNote = {An oxidation resistant, high temperature thermal cycling resistant coated ceramic article for ceramic heat engine applications is disclosed. The substrate is a silicon-based material, i.e. a silicon nitride- or silicon carbide-based monolithic or composite material. The coating is a graded coating of at least two layers: an intermediate AlN or Al[sub x]N[sub y]O[sub z] layer and an aluminum oxide or zirconium oxide outer layer. The composition of the coating changes gradually from that of the substrate to that of the AlN or Al[sub x]N[sub y]O[sub z] layer and further to the composition of the aluminum oxide or zirconium oxide outer layer. Other layers may be deposited over the aluminum oxide layer. A CVD process for depositing the graded coating on the substrate is also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1990},
month = {8}
}
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