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Title: Starter for inductively coupled plasma tube

Abstract

A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.

Inventors:
;
Issue Date:
OSTI Identifier:
7068459
Patent Number(s):
4766351
Application Number:
PPN: US 7-067080
Assignee:
PTO; EDB-94-117920
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Resource Relation:
Patent File Date: 29 Jun 1987
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; ELECTRICAL EQUIPMENT; DESIGN; PLASMA PRODUCTION; CONNECTORS; ELECTRIC PROBES; ELECTRONIC CIRCUITS; OPERATION; RF SYSTEMS; SHIELDING; CONDUCTOR DEVICES; EQUIPMENT; PROBES; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-)

Citation Formats

Hull, D E, and Bieniewski, T M. Starter for inductively coupled plasma tube. United States: N. p., 1988. Web.
Hull, D E, & Bieniewski, T M. Starter for inductively coupled plasma tube. United States.
Hull, D E, and Bieniewski, T M. Tue . "Starter for inductively coupled plasma tube". United States.
@article{osti_7068459,
title = {Starter for inductively coupled plasma tube},
author = {Hull, D E and Bieniewski, T M},
abstractNote = {A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1988},
month = {8}
}