Starter for inductively coupled plasma tube

Hull, D E; Bieniewski, T M

Title: Starter for inductively coupled plasma tube

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Abstract

A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.

Inventors:: Hull, D E; Bieniewski, T M

Issue Date:: 1988-08-23

OSTI Identifier:: 7068459

Patent Number(s):: 4766351

Application Number:: PPN: US 7-067080

Assignee:: PTO; EDB-94-117920

DOE Contract Number:: W-7405-ENG-36

Resource Type:: Patent

Resource Relation:: Patent File Date: 29 Jun 1987

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; ELECTRICAL EQUIPMENT; DESIGN; PLASMA PRODUCTION; CONNECTORS; ELECTRIC PROBES; ELECTRONIC CIRCUITS; OPERATION; RF SYSTEMS; SHIELDING; CONDUCTOR DEVICES; EQUIPMENT; PROBES; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-)

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                    Hull, D E, and Bieniewski, T M. Starter for inductively coupled plasma tube.  United States: N. p., 1988. 
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                    Hull, D E, & Bieniewski, T M. Starter for inductively coupled plasma tube.  United States.

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                    Hull, D E, and Bieniewski, T M. Tue .  
        "Starter for inductively coupled plasma tube".  United States.

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@article{osti_7068459,

  title        = {Starter for inductively coupled plasma tube},

  author       = {Hull, D E and Bieniewski, T M},

  abstractNote = {A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1988},

  month        = {8}

}

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Starter for inductively coupled plasma tube

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