Starter for inductively coupled plasma tube
Abstract
A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7068459
- Patent Number(s):
- 4766351
- Application Number:
- PPN: US 7-067080
- Assignee:
- PTO; EDB-94-117920
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 29 Jun 1987
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; ELECTRICAL EQUIPMENT; DESIGN; PLASMA PRODUCTION; CONNECTORS; ELECTRIC PROBES; ELECTRONIC CIRCUITS; OPERATION; RF SYSTEMS; SHIELDING; CONDUCTOR DEVICES; EQUIPMENT; PROBES; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-)
Citation Formats
Hull, D E, and Bieniewski, T M. Starter for inductively coupled plasma tube. United States: N. p., 1988.
Web.
Hull, D E, & Bieniewski, T M. Starter for inductively coupled plasma tube. United States.
Hull, D E, and Bieniewski, T M. Tue .
"Starter for inductively coupled plasma tube". United States.
@article{osti_7068459,
title = {Starter for inductively coupled plasma tube},
author = {Hull, D E and Bieniewski, T M},
abstractNote = {A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 23 00:00:00 EDT 1988},
month = {Tue Aug 23 00:00:00 EDT 1988}
}
Search for the full text at the U.S. Patent and Trademark Office
Note: You will be redirected to the USPTO site, which may require a pop-up blocker to be deactivated to view the patent. If so, you will need to manually turn off your browser's pop-up blocker, typically found within the browser settings. (See DOE Patents FAQs for more information.)
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.