Amorphous silicon ionizing particle detectors
Abstract
Amorphous silicon ionizing particle detectors having a hydrogenated amorphous silicon (a--Si:H) thin film deposited via plasma assisted chemical vapor deposition techniques are utilized to detect the presence, position and counting of high energy ionizing particles, such as electrons, x-rays, alpha particles, beta particles and gamma radiation. 15 figs.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7067899
- Patent Number(s):
- 4785186
- Application Number:
- PPN: US 6-921302
- Assignee:
- Xerox Corp., Stamford, CT (United States)
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 21 Oct 1986
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ALPHA DETECTION; SI SEMICONDUCTOR DETECTORS; BETA DETECTION; ELECTRON DETECTION; GAMMA DETECTION; X-RAY DETECTION; AMORPHOUS STATE; IONIZING RADIATIONS; POSITION SENSITIVE DETECTORS; CHARGED PARTICLE DETECTION; DETECTION; MEASURING INSTRUMENTS; RADIATION DETECTION; RADIATION DETECTORS; RADIATIONS; SEMICONDUCTOR DETECTORS; 440101* - Radiation Instrumentation- General Detectors or Monitors & Radiometric Instruments
Citation Formats
Street, R A, Mendez, V P, and Kaplan, S N. Amorphous silicon ionizing particle detectors. United States: N. p., 1988.
Web.
Street, R A, Mendez, V P, & Kaplan, S N. Amorphous silicon ionizing particle detectors. United States.
Street, R A, Mendez, V P, and Kaplan, S N. Tue .
"Amorphous silicon ionizing particle detectors". United States.
@article{osti_7067899,
title = {Amorphous silicon ionizing particle detectors},
author = {Street, R A and Mendez, V P and Kaplan, S N},
abstractNote = {Amorphous silicon ionizing particle detectors having a hydrogenated amorphous silicon (a--Si:H) thin film deposited via plasma assisted chemical vapor deposition techniques are utilized to detect the presence, position and counting of high energy ionizing particles, such as electrons, x-rays, alpha particles, beta particles and gamma radiation. 15 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1988},
month = {11}
}