Apparatus and method to enhance X-ray production in laser produced plasmas
Abstract
Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography is disclosed. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser. 8 figs.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7049965
- Patent Number(s):
- 5175757
- Application Number:
- PPN: US 7-571253
- Assignee:
- Sandia Corp.-Org. 250, Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 22 Aug 1990
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 07 ISOTOPES AND RADIATION SOURCES; LASER-PRODUCED PLASMA; X RADIATION; X-RAY SOURCES; DESIGN; LASER TARGETS; USES; VACUUM SYSTEMS; ELECTROMAGNETIC RADIATION; EQUIPMENT; IONIZING RADIATIONS; PLASMA; RADIATION SOURCES; RADIATIONS; TARGETS; X-RAY EQUIPMENT; 070201* - Radiation Sources- Design, Fabrication & Operation
Citation Formats
Augustoni, A L, Gerardo, J B, and Raymond, T D. Apparatus and method to enhance X-ray production in laser produced plasmas. United States: N. p., 1992.
Web.
Augustoni, A L, Gerardo, J B, & Raymond, T D. Apparatus and method to enhance X-ray production in laser produced plasmas. United States.
Augustoni, A L, Gerardo, J B, and Raymond, T D. Tue .
"Apparatus and method to enhance X-ray production in laser produced plasmas". United States.
@article{osti_7049965,
title = {Apparatus and method to enhance X-ray production in laser produced plasmas},
author = {Augustoni, A L and Gerardo, J B and Raymond, T D},
abstractNote = {Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography is disclosed. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1992},
month = {12}
}
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