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Title: Apparatus and method to enhance X-ray production in laser produced plasmas

Abstract

Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography is disclosed. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser. 8 figs.

Inventors:
; ;
Issue Date:
OSTI Identifier:
7049965
Patent Number(s):
5175757 A
Application Number:
PPN: US 7-571253
Assignee:
Sandia Corp.-Org. 250, Albuquerque, NM (United States) SNL; EDB-94-086949
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Patent File Date: 22 Aug 1990
Country of Publication:
United States
Language:
English
Subject:
07 ISOTOPES AND RADIATION SOURCES; LASER-PRODUCED PLASMA; X RADIATION; X-RAY SOURCES; DESIGN; LASER TARGETS; USES; VACUUM SYSTEMS; ELECTROMAGNETIC RADIATION; EQUIPMENT; IONIZING RADIATIONS; PLASMA; RADIATION SOURCES; RADIATIONS; TARGETS; X-RAY EQUIPMENT; 070201* - Radiation Sources- Design, Fabrication & Operation

Citation Formats

Augustoni, A.L., Gerardo, J.B., and Raymond, T.D. Apparatus and method to enhance X-ray production in laser produced plasmas. United States: N. p., 1992. Web.
Augustoni, A.L., Gerardo, J.B., & Raymond, T.D. Apparatus and method to enhance X-ray production in laser produced plasmas. United States.
Augustoni, A.L., Gerardo, J.B., and Raymond, T.D. Tue . "Apparatus and method to enhance X-ray production in laser produced plasmas". United States.
@article{osti_7049965,
title = {Apparatus and method to enhance X-ray production in laser produced plasmas},
author = {Augustoni, A.L. and Gerardo, J.B. and Raymond, T.D.},
abstractNote = {Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography is disclosed. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1992},
month = {12}
}