Unitaxial constant velocity microactuator
A uniaxial drive system or microactuator capable of operating in an ultra-high vacuum environment is disclosed. The mechanism includes a flexible coupling having a bore therethrough, and two clamp/pusher assemblies mounted in axial ends of the coupling. The clamp/pusher assemblies are energized by voltage-operated piezoelectrics therewithin to operatively engage the shaft and coupling causing the shaft to move along its rotational axis through the bore. The microactuator is capable of repeatably positioning to sub-nanometer accuracy while affording a scan range in excess of 5 centimeters. Moreover, the microactuator generates smooth, constant velocity motion profiles while producing a drive thrust of greater than 10 pounds. The system is remotely controlled and piezoelectrically driven, hence minimal thermal loading, vibrational excitation, or outgassing is introduced to the operating environment. 10 figs.
- Issue Date:
- OSTI Identifier:
- 7036348
- Assignee:
- Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States) PTO; EDB-94-102907
- Patent Number(s):
- US 5319257; A
- Application Number:
- PPN: US 7-912534
- Contract Number:
- AI05-81OR20806
- Resource Relation:
- Patent File Date: 13 Jul 1992
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; ACTUATORS; DESIGN; COUPLINGS; FASTENERS; PERFORMANCE; PIEZOELECTRICITY; POSITIONING; REMOTE CONTROL; SIZE; VACUUM SYSTEMS; CONTROL; ELECTRICITY; 420200* - Engineering- Facilities, Equipment, & Techniques