Radio-frequency powered glow discharge device and method with high voltage interface
Abstract
A high voltage accelerating potential, which is supplied by a high voltage direct current power supply, is applied to the electrically conducting interior wall of an RF powered glow discharge cell. The RF power supply desirably is electrically grounded, and the conductor carrying the RF power to the sample held by the probe is desirably shielded completely excepting only the conductor's terminal point of contact with the sample. The high voltage DC accelerating potential is not supplied to the sample. A high voltage capacitance is electrically connected in series between the sample on the one hand and the RF power supply and an impedance matching network on the other hand. The high voltage capacitance isolates the high DC voltage from the RF electronics, while the RF potential is passed across the high voltage capacitance to the plasma. An inductor protects at least the RF power supply, and desirably the impedance matching network as well, from a short that might occur across the high voltage capacitance. The discharge cell and the probe which holds the sample are configured and disposed to prevent the probe's components, which are maintained at ground potential, from bridging between the relatively low vacuum region in communicationmore »
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7027483
- Patent Number(s):
- 5325021
- Application Number:
- PPN: US 7-944216
- Assignee:
- Clemson University, Clemson, SC (United States)
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 11 Sep 1992
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; ELECTRICAL EQUIPMENT; DESIGN; GLOW DISCHARGES; ELECTRIC CONDUCTORS; ELECTRIC POTENTIAL; EQUIPMENT INTERFACES; POWER SUPPLIES; RF SYSTEMS; SAMPLE HOLDERS; ELECTRIC DISCHARGES; ELECTRONIC EQUIPMENT; EQUIPMENT; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-)
Citation Formats
Duckworth, D C, Marcus, R K, Donohue, D L, and Lewis, T A. Radio-frequency powered glow discharge device and method with high voltage interface. United States: N. p., 1994.
Web.
Duckworth, D C, Marcus, R K, Donohue, D L, & Lewis, T A. Radio-frequency powered glow discharge device and method with high voltage interface. United States.
Duckworth, D C, Marcus, R K, Donohue, D L, and Lewis, T A. Tue .
"Radio-frequency powered glow discharge device and method with high voltage interface". United States.
@article{osti_7027483,
title = {Radio-frequency powered glow discharge device and method with high voltage interface},
author = {Duckworth, D C and Marcus, R K and Donohue, D L and Lewis, T A},
abstractNote = {A high voltage accelerating potential, which is supplied by a high voltage direct current power supply, is applied to the electrically conducting interior wall of an RF powered glow discharge cell. The RF power supply desirably is electrically grounded, and the conductor carrying the RF power to the sample held by the probe is desirably shielded completely excepting only the conductor's terminal point of contact with the sample. The high voltage DC accelerating potential is not supplied to the sample. A high voltage capacitance is electrically connected in series between the sample on the one hand and the RF power supply and an impedance matching network on the other hand. The high voltage capacitance isolates the high DC voltage from the RF electronics, while the RF potential is passed across the high voltage capacitance to the plasma. An inductor protects at least the RF power supply, and desirably the impedance matching network as well, from a short that might occur across the high voltage capacitance. The discharge cell and the probe which holds the sample are configured and disposed to prevent the probe's components, which are maintained at ground potential, from bridging between the relatively low vacuum region in communication with the glow discharge maintained within the cell on the one hand, and the relatively high vacuum region surrounding the probe and cell on the other hand. The probe and cell also are configured and disposed to prevent the probe's components from electrically shorting the cell's components. 11 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 28 00:00:00 EDT 1994},
month = {Tue Jun 28 00:00:00 EDT 1994}
}