Process for etching mixed metal oxides
Abstract
An etching process is described using dicarboxylic and tricarboxylic acids as chelating etchants for mixed metal oxide films such as high temperature superconductors and ferroelectric materials. Undesirable differential etching rates between different metal oxides are avoided by selection of the proper acid or combination of acids. Feature sizes below one micron, excellent quality vertical edges, and film thicknesses in the 100 Angstrom range may be achieved by this method. 1 fig.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6996940
- Patent Number(s):
- 5356516
- Application Number:
- PPN: US 8-023286
- Assignee:
- Sandia Corp., Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 26 Feb 1993
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; FERROELECTRIC MATERIALS; ETCHING; HIGH-TC SUPERCONDUCTORS; CARBOXYLIC ACIDS; THIN FILMS; FILMS; ORGANIC ACIDS; ORGANIC COMPOUNDS; SUPERCONDUCTORS; SURFACE FINISHING; 360601* - Other Materials- Preparation & Manufacture
Citation Formats
Ashby, C I.H., and Ginley, D S. Process for etching mixed metal oxides. United States: N. p., 1994.
Web.
Ashby, C I.H., & Ginley, D S. Process for etching mixed metal oxides. United States.
Ashby, C I.H., and Ginley, D S. Tue .
"Process for etching mixed metal oxides". United States.
@article{osti_6996940,
title = {Process for etching mixed metal oxides},
author = {Ashby, C I.H. and Ginley, D S},
abstractNote = {An etching process is described using dicarboxylic and tricarboxylic acids as chelating etchants for mixed metal oxide films such as high temperature superconductors and ferroelectric materials. Undesirable differential etching rates between different metal oxides are avoided by selection of the proper acid or combination of acids. Feature sizes below one micron, excellent quality vertical edges, and film thicknesses in the 100 Angstrom range may be achieved by this method. 1 fig.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {10}
}
Search for the full text at the U.S. Patent and Trademark Office
Note: You will be redirected to the USPTO site, which may require a pop-up blocker to be deactivated to view the patent. If so, you will need to manually turn off your browser's pop-up blocker, typically found within the browser settings. (See DOE Patents FAQs for more information.)
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.