[beta]-silicon carbide protective coating and method for fabricating same
Abstract
A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating are disclosed. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or [mu]c-SiC film on the surface and produce [beta]-SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface. 3 figs.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6996690
- Patent Number(s):
- 5360491
- Application Number:
- PPN: US 8-043809
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 7 Apr 1993
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 14 SOLAR ENERGY; SILICON CARBIDES; SURFACE COATING; SOLAR CELLS; ANTIREFLECTION COATINGS; PROTECTIVE COATINGS; LASER RADIATION; SPUTTERING; CARBIDES; CARBON COMPOUNDS; COATINGS; DEPOSITION; DIRECT ENERGY CONVERTERS; ELECTROMAGNETIC RADIATION; EQUIPMENT; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; RADIATIONS; SILICON COMPOUNDS; SOLAR EQUIPMENT; 360601* - Other Materials- Preparation & Manufacture; 140501 - Solar Energy Conversion- Photovoltaic Conversion
Citation Formats
Carey, P G, and Thompson, J B. [beta]-silicon carbide protective coating and method for fabricating same. United States: N. p., 1994.
Web.
Carey, P G, & Thompson, J B. [beta]-silicon carbide protective coating and method for fabricating same. United States.
Carey, P G, and Thompson, J B. Tue .
"[beta]-silicon carbide protective coating and method for fabricating same". United States.
@article{osti_6996690,
title = {[beta]-silicon carbide protective coating and method for fabricating same},
author = {Carey, P G and Thompson, J B},
abstractNote = {A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating are disclosed. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or [mu]c-SiC film on the surface and produce [beta]-SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {11}
}
Search for the full text at the U.S. Patent and Trademark Office
Note: You will be redirected to the USPTO site, which may require a pop-up blocker to be deactivated to view the patent. If so, you will need to manually turn off your browser's pop-up blocker, typically found within the browser settings. (See DOE Patents FAQs for more information.)
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.