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Title: [beta]-silicon carbide protective coating and method for fabricating same

Abstract

A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating are disclosed. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or [mu]c-SiC film on the surface and produce [beta]-SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface. 3 figs.

Inventors:
;
Issue Date:
OSTI Identifier:
6996690
Patent Number(s):
5360491 A
Application Number:
PPN: US 8-043809
Assignee:
Dept. of Energy, Washington, DC (United States) PTO; EDB-94-167744
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Patent File Date: 7 Apr 1993
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 14 SOLAR ENERGY; SILICON CARBIDES; SURFACE COATING; SOLAR CELLS; ANTIREFLECTION COATINGS; PROTECTIVE COATINGS; LASER RADIATION; SPUTTERING; CARBIDES; CARBON COMPOUNDS; COATINGS; DEPOSITION; DIRECT ENERGY CONVERTERS; ELECTROMAGNETIC RADIATION; EQUIPMENT; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; RADIATIONS; SILICON COMPOUNDS; SOLAR EQUIPMENT; 360601* - Other Materials- Preparation & Manufacture; 140501 - Solar Energy Conversion- Photovoltaic Conversion

Citation Formats

Carey, P.G., and Thompson, J.B. [beta]-silicon carbide protective coating and method for fabricating same. United States: N. p., 1994. Web.
Carey, P.G., & Thompson, J.B. [beta]-silicon carbide protective coating and method for fabricating same. United States.
Carey, P.G., and Thompson, J.B. Tue . "[beta]-silicon carbide protective coating and method for fabricating same". United States.
@article{osti_6996690,
title = {[beta]-silicon carbide protective coating and method for fabricating same},
author = {Carey, P.G. and Thompson, J.B.},
abstractNote = {A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating are disclosed. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or [mu]c-SiC film on the surface and produce [beta]-SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {11}
}