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Title: Method of digital epitaxy by externally controlled closed-loop feedback

Abstract

A method and apparatus for digital epitaxy are disclosed. The apparatus includes a pulsed gas delivery assembly that supplies gaseous material to a substrate to form an adsorption layer of the gaseous material on the substrate. Structure is provided for measuring the isothermal desorption spectrum of the growth surface to monitor the active sites which are available for adsorption. The vacuum chamber housing the substrate facilitates evacuation of the gaseous material from the area adjacent the substrate following exposure. In use, digital epitaxy is achieved by exposing a substrate to a pulse of gaseous material to form an adsorption layer of the material on the substrate. The active sites on the substrate are monitored during the formation of the adsorption layer to determine if all the active sites have been filled. Once the active sites have been filled on the growth surface of the substrate, the pulse of gaseous material is terminated. The unreacted portion of the gas pulse is evacuated by continuous pumping. Subsequently, a second pulse is applied when availability of active sites is determined by studying the isothermal desorption spectrum. These steps are repeated until a thin film of sufficient thickness is produced. 4 figs.

Inventors:
;
Issue Date:
OSTI Identifier:
6983545
Patent Number(s):
5330610 A
Application Number:
PPN: US 8-068027
Assignee:
Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States) PTO; EDB-94-131241
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Resource Relation:
Patent File Date: 28 May 1993
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; MATERIALS; VAPOR PHASE EPITAXY; CLOSED-LOOP CONTROL; PROCESS CONTROL; VACUUM SYSTEMS; CONTROL; EPITAXY; 360101* - Metals & Alloys- Preparation & Fabrication; 360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360601 - Other Materials- Preparation & Manufacture

Citation Formats

Eres, D., and Sharp, J.W. Method of digital epitaxy by externally controlled closed-loop feedback. United States: N. p., 1994. Web.
Eres, D., & Sharp, J.W. Method of digital epitaxy by externally controlled closed-loop feedback. United States.
Eres, D., and Sharp, J.W. Tue . "Method of digital epitaxy by externally controlled closed-loop feedback". United States.
@article{osti_6983545,
title = {Method of digital epitaxy by externally controlled closed-loop feedback},
author = {Eres, D. and Sharp, J.W.},
abstractNote = {A method and apparatus for digital epitaxy are disclosed. The apparatus includes a pulsed gas delivery assembly that supplies gaseous material to a substrate to form an adsorption layer of the gaseous material on the substrate. Structure is provided for measuring the isothermal desorption spectrum of the growth surface to monitor the active sites which are available for adsorption. The vacuum chamber housing the substrate facilitates evacuation of the gaseous material from the area adjacent the substrate following exposure. In use, digital epitaxy is achieved by exposing a substrate to a pulse of gaseous material to form an adsorption layer of the material on the substrate. The active sites on the substrate are monitored during the formation of the adsorption layer to determine if all the active sites have been filled. Once the active sites have been filled on the growth surface of the substrate, the pulse of gaseous material is terminated. The unreacted portion of the gas pulse is evacuated by continuous pumping. Subsequently, a second pulse is applied when availability of active sites is determined by studying the isothermal desorption spectrum. These steps are repeated until a thin film of sufficient thickness is produced. 4 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {7}
}