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Title: Micro-machined resonator oscillator

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a telemetered sensor beacon'' that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20--100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available. 21 figs.
Inventors:
; ; ;
Issue Date:
OSTI Identifier:
6979186
Assignee:
Sandia Corp., Albuquerque, NM (United States) SNL; EDB-94-132707
Patent Number(s):
US 5339051; A
Application Number:
PPN: US 8-039638
Contract Number:
AC04-76DP00789
Resource Relation:
Patent File Date: 30 Mar 1993
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 47 OTHER INSTRUMENTATION; OSCILLATORS; DESIGN; USES; MINIATURIZATION; PRESSURE MEASUREMENT; RESONATORS; TEMPERATURE MEASUREMENT; ELECTRONIC EQUIPMENT; EQUIPMENT; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-); 440000 - Instrumentation