Micro-machined resonator oscillator
Abstract
A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a telemetered sensor beacon'' that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20--100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available. 21 figs.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6979186
- Patent Number(s):
- 5339051
- Application Number:
- PPN: US 8-039638
- Assignee:
- Sandia Corp., Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 30 Mar 1993
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; 47 OTHER INSTRUMENTATION; OSCILLATORS; DESIGN; USES; MINIATURIZATION; PRESSURE MEASUREMENT; RESONATORS; TEMPERATURE MEASUREMENT; ELECTRONIC EQUIPMENT; EQUIPMENT; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-); 440000 - Instrumentation
Citation Formats
Koehler, D R, Sniegowski, J J, Bivens, H M, and Wessendorf, K O. Micro-machined resonator oscillator. United States: N. p., 1994.
Web.
Koehler, D R, Sniegowski, J J, Bivens, H M, & Wessendorf, K O. Micro-machined resonator oscillator. United States.
Koehler, D R, Sniegowski, J J, Bivens, H M, and Wessendorf, K O. Tue .
"Micro-machined resonator oscillator". United States.
@article{osti_6979186,
title = {Micro-machined resonator oscillator},
author = {Koehler, D R and Sniegowski, J J and Bivens, H M and Wessendorf, K O},
abstractNote = {A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a telemetered sensor beacon'' that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20--100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available. 21 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {8}
}