Solar-induced chemical vapor deposition of diamond-type carbon films

Title: Solar-induced chemical vapor deposition of diamond-type carbon films

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Abstract

An improved chemical vapor deposition method for depositing transparent continuous coatings of sp[sup 3]-bonded diamond-type carbon films, comprises: (a) providing a volatile hydrocarbon gas/H[sub 2] reactant mixture in a cold wall vacuum/chemical vapor deposition chamber containing a suitable substrate for said films, at pressure of about 1 to 50 Torr; and (b) directing a concentrated solar flux of from about 40 to about 60 watts/cm[sup 2] through said reactant mixture to produce substrate temperatures of about 750 C to about 950 C to activate deposition of the film on said substrate. 11 figs.

Inventors:: Pitts, J R; Tracy, C E; King, D E; Stanley, J T

Issue Date:: 1994-09-13

OSTI Identifier:: 6954543

Patent Number(s):: 5346729 A

Application Number:: PPN: US 8-062840

Assignee:: Midwest Research Inst., Kansas City, MO (United States)

DOE Contract Number:: AC02-83CH10093

Resource Type:: Patent

Resource Relation:: Patent File Date: 17 May 1993

Country of Publication:: United States

Language:: English

Subject:: 14 SOLAR ENERGY; 36 MATERIALS SCIENCE; CHEMICAL REACTORS; SOLAR HEATING; DIAMONDS; CHEMICAL VAPOR DEPOSITION; SOLAR PROCESS HEAT; THIN FILMS; CARBON; CHEMICAL COATING; DEPOSITION; ELEMENTAL MINERALS; ELEMENTS; ENERGY; FILMS; HEAT; HEATING; MINERALS; NONMETALS; PROCESS HEAT; SURFACE COATING; 140905*; 360601 - Other Materials- Preparation & Manufacture

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                    Pitts, J R, Tracy, C E, King, D E, and Stanley, J T. Solar-induced chemical vapor deposition of diamond-type carbon films.  United States: N. p., 1994. 
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                    Pitts, J R, Tracy, C E, King, D E, & Stanley, J T. Solar-induced chemical vapor deposition of diamond-type carbon films.  United States.

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                    Pitts, J R, Tracy, C E, King, D E, and Stanley, J T. Tue .  
        "Solar-induced chemical vapor deposition of diamond-type carbon films".  United States.

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@article{osti_6954543,

  title        = {Solar-induced chemical vapor deposition of diamond-type carbon films},

  author       = {Pitts, J R and Tracy, C E and King, D E and Stanley, J T},

  abstractNote = {An improved chemical vapor deposition method for depositing transparent continuous coatings of sp[sup 3]-bonded diamond-type carbon films, comprises: (a) providing a volatile hydrocarbon gas/H[sub 2] reactant mixture in a cold wall vacuum/chemical vapor deposition chamber containing a suitable substrate for said films, at pressure of about 1 to 50 Torr; and (b) directing a concentrated solar flux of from about 40 to about 60 watts/cm[sup 2] through said reactant mixture to produce substrate temperatures of about 750 C to about 950 C to activate deposition of the film on said substrate. 11 figs.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1994},

  month        = {9}

}

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