Hot hollow cathode gun assembly
Abstract
A hot hollow cathode deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, the hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6900101
- Application Number:
- ON: DE84014312
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- AC04-76DP03533
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; HOLLOW CATHODES; DESIGN; CYLINDRICAL CONFIGURATION; HEAT SINKS; MAGNETIC FIELDS; MECHANICAL STRUCTURES; PLASMA; CATHODES; CONFIGURATION; ELECTRODES; SINKS; 420200* - Engineering- Facilities, Equipment, & Techniques
Citation Formats
Zeren, J D. Hot hollow cathode gun assembly. United States: N. p., 1983.
Web.
Zeren, J D. Hot hollow cathode gun assembly. United States.
Zeren, J D. Tue .
"Hot hollow cathode gun assembly". United States.
@article{osti_6900101,
title = {Hot hollow cathode gun assembly},
author = {Zeren, J D},
abstractNote = {A hot hollow cathode deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, the hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1983},
month = {11}
}
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