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Title: Hot hollow cathode gun assembly

Abstract

A hot hollow cathode deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, the hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.

Inventors:
Issue Date:
OSTI Identifier:
6900101
Application Number:
ON: DE84014312
Assignee:
Dept. of Energy EDB-84-140311
DOE Contract Number:  
AC04-76DP03533
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; HOLLOW CATHODES; DESIGN; CYLINDRICAL CONFIGURATION; HEAT SINKS; MAGNETIC FIELDS; MECHANICAL STRUCTURES; PLASMA; CATHODES; CONFIGURATION; ELECTRODES; SINKS 420200* -- Engineering-- Facilities, Equipment, & Techniques

Citation Formats

Zeren, J.D. Hot hollow cathode gun assembly. United States: N. p., 1983. Web.
Zeren, J.D. Hot hollow cathode gun assembly. United States.
Zeren, J.D. Tue . "Hot hollow cathode gun assembly". United States.
@article{osti_6900101,
title = {Hot hollow cathode gun assembly},
author = {Zeren, J.D.},
abstractNote = {A hot hollow cathode deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, the hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1983},
month = {11}
}