Hot hollow cathode gun assembly

Title: Hot hollow cathode gun assembly

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Abstract

A hot hollow cathode deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, the hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.

Inventors:: Zeren, J.D.

Issue Date:: 1983-11-22

OSTI Identifier:: 6900101

Application Number:: ON: DE84014312

Assignee:: Dept. of Energy EDB-84-140311

DOE Contract Number:: AC04-76DP03533

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; HOLLOW CATHODES; DESIGN; CYLINDRICAL CONFIGURATION; HEAT SINKS; MAGNETIC FIELDS; MECHANICAL STRUCTURES; PLASMA; CATHODES; CONFIGURATION; ELECTRODES; SINKS 420200* -- Engineering-- Facilities, Equipment, & Techniques

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                    Zeren, J.D. Hot hollow cathode gun assembly.  United States: N. p., 1983. 
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                    Zeren, J.D. Hot hollow cathode gun assembly.  United States.

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                    Zeren, J.D. Tue .  
        "Hot hollow cathode gun assembly".  United States.

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@article{osti_6900101,

  title        = {Hot hollow cathode gun assembly},

  author       = {Zeren, J.D.},

  abstractNote = {A hot hollow cathode deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, the hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1983},

  month        = {11}

}

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