Method for fabricating thin films of pyrolytic carbon
Abstract
The present invention relates to a method for fabricating ultrathin films of pyrolytic carbon. Pyrolytic carbon is vapor deposited onto a concave surface of a heated substrate to a total uniform thickness in the range of about 0.1 to 1.0 micrometer. The carbon film on the substrate is provided with a layer of adherent polymeric resin. The resulting composite film of pyrolytic carbon and polymeric resin is then easily separated from the substrate by shrinking the 10 polymeric resin coating with thermally induced forces.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6876860
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- W-7405-ENG-26
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; PYROLYTIC CARBON; FABRICATION; VAPOR DEPOSITED COATINGS; CARBON; COATINGS; ELEMENTS; NONMETALS; 360601* - Other Materials- Preparation & Manufacture
Citation Formats
Brassell, G W, Lewis, J Jr, and Weber, G W. Method for fabricating thin films of pyrolytic carbon. United States: N. p., 1980.
Web.
Brassell, G W, Lewis, J Jr, & Weber, G W. Method for fabricating thin films of pyrolytic carbon. United States.
Brassell, G W, Lewis, J Jr, and Weber, G W. Thu .
"Method for fabricating thin films of pyrolytic carbon". United States.
@article{osti_6876860,
title = {Method for fabricating thin films of pyrolytic carbon},
author = {Brassell, G W and Lewis, J Jr and Weber, G W},
abstractNote = {The present invention relates to a method for fabricating ultrathin films of pyrolytic carbon. Pyrolytic carbon is vapor deposited onto a concave surface of a heated substrate to a total uniform thickness in the range of about 0.1 to 1.0 micrometer. The carbon film on the substrate is provided with a layer of adherent polymeric resin. The resulting composite film of pyrolytic carbon and polymeric resin is then easily separated from the substrate by shrinking the 10 polymeric resin coating with thermally induced forces.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Mar 13 00:00:00 EST 1980},
month = {Thu Mar 13 00:00:00 EST 1980}
}
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