skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Method and apparatus for laser/plasma chemical processing of substrates

Abstract

A process for the modification of substrate surfaces is described, wherein etching or deposition at a surface occurs only in the presence of both reactive species and a directed beam of coherent light.

Inventors:
;
Issue Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (USA)
OSTI Identifier:
6759913
Application Number:
ON: DE87007260
Assignee:
Dept. of Energy SNL; EDB-87-104238
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; SUBSTRATES; SURFACE TREATMENTS; LASER RADIATION; ALUMINIUM; DEPOSITION; EPITAXY; ETCHING; GALLIUM ARSENIDES; IRRADIATION; SILANES; TUNGSTEN; ARSENIC COMPOUNDS; ARSENIDES; ELECTROMAGNETIC RADIATION; ELEMENTS; GALLIUM COMPOUNDS; HYDRIDES; HYDROGEN COMPOUNDS; METALS; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; PNICTIDES; RADIATIONS; SILICON COMPOUNDS; SURFACE FINISHING; TRANSITION ELEMENTS 420800* -- Engineering-- Electronic Circuits & Devices-- (-1989)

Citation Formats

Gee, J.M., and Hargis, P.J. Jr. Method and apparatus for laser/plasma chemical processing of substrates. United States: N. p., 1984. Web.
Gee, J.M., & Hargis, P.J. Jr. Method and apparatus for laser/plasma chemical processing of substrates. United States.
Gee, J.M., and Hargis, P.J. Jr. Sat . "Method and apparatus for laser/plasma chemical processing of substrates". United States.
@article{osti_6759913,
title = {Method and apparatus for laser/plasma chemical processing of substrates},
author = {Gee, J.M. and Hargis, P.J. Jr.},
abstractNote = {A process for the modification of substrate surfaces is described, wherein etching or deposition at a surface occurs only in the presence of both reactive species and a directed beam of coherent light.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1984},
month = {7}
}