Multi-layer carbon-based coatings for field emission
Abstract
A multi-layer resistive carbon film field emitter device for cold cathode field emission applications is disclosed. The multi-layered film of the present invention consists of at least two layers of a conductive carbon material, preferably amorphous-tetrahedrally coordinated carbon, where the resistivities of adjacent layers differ. For electron emission from the surface, the preferred structure can be a top layer having a lower resistivity than the bottom layer. For edge emitting structures, the preferred structure of the film can be a plurality of carbon layers, where adjacent layers have different resistivities. Through selection of deposition conditions, including the energy of the depositing carbon species, the presence or absence of certain elements such as H, N, inert gases or boron, carbon layers having desired resistivities can be produced. 8 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 675861
- Patent Number(s):
- 5821680
- Application Number:
- PAN: 8-731,651
- Assignee:
- Sandia Corp., Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 13 Oct 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; CARBON; FIELD EMISSION; CATHODES; AMORPHOUS STATE; ELECTRON EMISSION; LAYERS; ELECTRIC CONDUCTIVITY; HYDROGEN; NITROGEN; DESIGN
Citation Formats
Sullivan, J P, and Friedmann, T A. Multi-layer carbon-based coatings for field emission. United States: N. p., 1998.
Web.
Sullivan, J P, & Friedmann, T A. Multi-layer carbon-based coatings for field emission. United States.
Sullivan, J P, and Friedmann, T A. Tue .
"Multi-layer carbon-based coatings for field emission". United States.
@article{osti_675861,
title = {Multi-layer carbon-based coatings for field emission},
author = {Sullivan, J P and Friedmann, T A},
abstractNote = {A multi-layer resistive carbon film field emitter device for cold cathode field emission applications is disclosed. The multi-layered film of the present invention consists of at least two layers of a conductive carbon material, preferably amorphous-tetrahedrally coordinated carbon, where the resistivities of adjacent layers differ. For electron emission from the surface, the preferred structure can be a top layer having a lower resistivity than the bottom layer. For edge emitting structures, the preferred structure of the film can be a plurality of carbon layers, where adjacent layers have different resistivities. Through selection of deposition conditions, including the energy of the depositing carbon species, the presence or absence of certain elements such as H, N, inert gases or boron, carbon layers having desired resistivities can be produced. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 13 00:00:00 EDT 1998},
month = {Tue Oct 13 00:00:00 EDT 1998}
}