Compton backscattered collimated x-ray source
Abstract
A high-intensity, inexpensive and collimated x-ray source is disclosed for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications. 4 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Stanford Univ., CA (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 675852
- Patent Number(s):
- 5825847
- Application Number:
- PAN: 8-910,816; TRN: 99:001151
- Assignee:
- Leland Stanford Junior Univ., Palo Alto, CA (United States)
- DOE Contract Number:
- AC03-76SF00515
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 20 Oct 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 43 PARTICLE ACCELERATORS; X-RAY SOURCES; DESIGN; MICROELECTRONICS; ELECTRON BEAMS; LASER RADIATION; COLLIDING BEAMS; STORAGE RINGS; USES; COMPTON EFFECT; BACKSCATTERING
Citation Formats
Ruth, R D, and Huang, Z. Compton backscattered collimated x-ray source. United States: N. p., 1998.
Web.
Ruth, R D, & Huang, Z. Compton backscattered collimated x-ray source. United States.
Ruth, R D, and Huang, Z. Tue .
"Compton backscattered collimated x-ray source". United States.
@article{osti_675852,
title = {Compton backscattered collimated x-ray source},
author = {Ruth, R D and Huang, Z},
abstractNote = {A high-intensity, inexpensive and collimated x-ray source is disclosed for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications. 4 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {10}
}