Glass-ceramic hermetic seals to high thermal expansion metals

Kramer, D P; Massey, R T

Title: Glass-ceramic hermetic seals to high thermal expansion metals

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Abstract

A process for forming glass-ceramic materials from an alkaline silica-lithia glass composition comprising 60-72 mole-% SiO/sub 2/, 18-27 mole-% Li/sub 2/O, 0-5 mole-% Al/sub 2/O/sub 3/, 0-6 mole-% K/sub 2/O, 0-3 mole-% B/sub 2/O/sub 3/, and 0.5-2.5 mole-% P/sub 2/O/sub 5/, which comprises heating said glass composition at a first temperature within the 950-1050/degree/C range for 5-60 minutes, and then at a devitrification temperature within the 700-900/degree/C range for about 5-300 minutes to obtain a glass-ceramic having a thermal expansion coefficient of up to 210 x 10/sup /minus/7///degree/C. These ceramics form strong, hermetic seals with high expansion metals such as stainless steel alloys. An intermediate nucleation heating step conducted at a temperature within the range of 675-750/degree/C for 10-120 minutes may be employed between the first stage and the devitrification stage. 1 fig., 2 tabs.

Inventors:: Kramer, D P; Massey, R T

Issue Date:: 1987-04-28

Research Org.:: EG and G Mound Applied Technologies, Miamisburg, OH (USA)

OSTI Identifier:: 6749151

Patent Number(s):: 6043526

Assignee:: TIC; ERA-14-001157; EDB-88-184938

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L27/10852 - {the capacitor extending over the access transistor}
H01L27/11502 - with ferroelectric memory capacitors
H01L28/75 - {comprising two or more layers, e.g. comprising a barrier layer and a metal layer}
H01L28/55 - {with a dielectric comprising a perovskite structure material}
H01L27/11507 - characterised by the memory core region

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DOE Contract Number:: AC04-76DP00053

Resource Type:: Patent

Resource Relation:: Other Information: Portions of this document are illegible in microfiche products

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; LITHIUM OXIDES; SEALS; SILICA; CERAMICS; CHEMICAL COMPOSITION; DESIGN; GLASS; HEAT TREATMENTS; THERMAL EXPANSION; ALKALI METAL COMPOUNDS; CHALCOGENIDES; EXPANSION; LITHIUM COMPOUNDS; MINERALS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; SILICON COMPOUNDS; SILICON OXIDES; 360601* - Other Materials- Preparation & Manufacture; 360603 - Materials- Properties

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                    Kramer, D P, and Massey, R T. Glass-ceramic hermetic seals to high thermal expansion metals.  United States: N. p., 1987. 
        Web.

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                    Kramer, D P, & Massey, R T. Glass-ceramic hermetic seals to high thermal expansion metals.  United States.

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                    Kramer, D P, and Massey, R T. Tue .  
        "Glass-ceramic hermetic seals to high thermal expansion metals".  United States.

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@article{osti_6749151,

  title        = {Glass-ceramic hermetic seals to high thermal expansion metals},

  author       = {Kramer, D P and Massey, R T},

  abstractNote = {A process for forming glass-ceramic materials from an alkaline silica-lithia glass composition comprising 60-72 mole-% SiO/sub 2/, 18-27 mole-% Li/sub 2/O, 0-5 mole-% Al/sub 2/O/sub 3/, 0-6 mole-% K/sub 2/O, 0-3 mole-% B/sub 2/O/sub 3/, and 0.5-2.5 mole-% P/sub 2/O/sub 5/, which comprises heating said glass composition at a first temperature within the 950-1050/degree/C range for 5-60 minutes, and then at a devitrification temperature within the 700-900/degree/C range for about 5-300 minutes to obtain a glass-ceramic having a thermal expansion coefficient of up to 210 x 10/sup /minus/7///degree/C. These ceramics form strong, hermetic seals with high expansion metals such as stainless steel alloys. An intermediate nucleation heating step conducted at a temperature within the range of 675-750/degree/C for 10-120 minutes may be employed between the first stage and the devitrification stage. 1 fig., 2 tabs.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1987},

  month        = {4}

}

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