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Title: X-ray beamsplitter

Abstract

An x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5--50 pairs of alternate Mo/Si layers with a period of 20--250 A. The support membrane is 10--200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window. 6 figs.

Inventors:
; ; ;
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
6741731
Patent Number(s):
6082468
Assignee:
LLNL; ERA-14-001598; EDB-88-186306
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B25 - HAND TOOLS B25B - TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
B - PERFORMING OPERATIONS B25 - HAND TOOLS B25F - COMBINATION OR MULTI-PURPOSE TOOLS NOT OTHERWISE PROVIDED FOR
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; BEAM SPLITTING; X-RAY EQUIPMENT; DESIGN; INVENTIONS; LAYERS; MOLYBDENUM; THIN FILMS; ELEMENTS; EQUIPMENT; FILMS; METALS; TRANSITION ELEMENTS; 440300* - Miscellaneous Instruments- (-1989)

Citation Formats

Ceglio, N M, Stearns, D G, Hawryluk, A M, and Barbee, Jr, T W. X-ray beamsplitter. United States: N. p., 1987. Web.
Ceglio, N M, Stearns, D G, Hawryluk, A M, & Barbee, Jr, T W. X-ray beamsplitter. United States.
Ceglio, N M, Stearns, D G, Hawryluk, A M, and Barbee, Jr, T W. Fri . "X-ray beamsplitter". United States.
@article{osti_6741731,
title = {X-ray beamsplitter},
author = {Ceglio, N M and Stearns, D G and Hawryluk, A M and Barbee, Jr, T W},
abstractNote = {An x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5--50 pairs of alternate Mo/Si layers with a period of 20--250 A. The support membrane is 10--200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window. 6 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1987},
month = {8}
}