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Title: Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent

Abstract

The acoustic-wave sensor is disclosed. The acoustic-wave sensor is designed for ambient or vapor-phase monitoring of a photoresist-stripping agent such as N-methylpyrrolidinone (NMP), ethoxyethylpropionate (EEP) or the like. The acoustic-wave sensor comprises an acoustic-wave device such as a surface-acoustic-wave (SAW) device, a flexural-plate-wave (FPW) device, an acoustic-plate-mode (APM) device, or a thickness-shear-mode (TSM) device (also termed a quartz crystal microbalance or QCM) having a sensing region on a surface thereof. The sensing region includes a sensing film for sorbing a quantity of the photoresist-stripping agent, thereby altering or shifting a frequency of oscillation of an acoustic wave propagating through the sensing region for indicating an ambient concentration of the agent. According to preferred embodiments of the invention, the acoustic-wave device is a SAW device; and the sensing film comprises poly(vinylacetate), poly(N-vinylpyrrolidinone), or poly(vinylphenol). 3 figs.

Inventors:
; ;
Issue Date:
Research Org.:
Sandia Corporation
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
672718
Patent Number(s):
5,795,993
Application Number:
PAN: 8-564,764
Assignee:
Sandia Corp., Albuquerque, NM (United States) SNL; SCA: 320107; 540120; PA: EDB-98:119077; SN: 98002026881
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 18 Aug 1998
Country of Publication:
United States
Language:
English
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 54 ENVIRONMENTAL SCIENCES; GAS ANALYSIS; DESIGN; MEASURING INSTRUMENTS; MASKING; MICROELECTRONIC CIRCUITS; SOUND WAVES; ORGANIC SOLVENTS; INDOOR AIR POLLUTION; AIR POLLUTION MONITORS

Citation Formats

Pfeifer, K.B., Hoyt, A.E., and Frye, G.C. Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent. United States: N. p., 1998. Web.
Pfeifer, K.B., Hoyt, A.E., & Frye, G.C. Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent. United States.
Pfeifer, K.B., Hoyt, A.E., and Frye, G.C. Tue . "Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent". United States.
@article{osti_672718,
title = {Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent},
author = {Pfeifer, K.B. and Hoyt, A.E. and Frye, G.C.},
abstractNote = {The acoustic-wave sensor is disclosed. The acoustic-wave sensor is designed for ambient or vapor-phase monitoring of a photoresist-stripping agent such as N-methylpyrrolidinone (NMP), ethoxyethylpropionate (EEP) or the like. The acoustic-wave sensor comprises an acoustic-wave device such as a surface-acoustic-wave (SAW) device, a flexural-plate-wave (FPW) device, an acoustic-plate-mode (APM) device, or a thickness-shear-mode (TSM) device (also termed a quartz crystal microbalance or QCM) having a sensing region on a surface thereof. The sensing region includes a sensing film for sorbing a quantity of the photoresist-stripping agent, thereby altering or shifting a frequency of oscillation of an acoustic wave propagating through the sensing region for indicating an ambient concentration of the agent. According to preferred embodiments of the invention, the acoustic-wave device is a SAW device; and the sensing film comprises poly(vinylacetate), poly(N-vinylpyrrolidinone), or poly(vinylphenol). 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {8}
}