Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent
Abstract
The acoustic-wave sensor is disclosed. The acoustic-wave sensor is designed for ambient or vapor-phase monitoring of a photoresist-stripping agent such as N-methylpyrrolidinone (NMP), ethoxyethylpropionate (EEP) or the like. The acoustic-wave sensor comprises an acoustic-wave device such as a surface-acoustic-wave (SAW) device, a flexural-plate-wave (FPW) device, an acoustic-plate-mode (APM) device, or a thickness-shear-mode (TSM) device (also termed a quartz crystal microbalance or QCM) having a sensing region on a surface thereof. The sensing region includes a sensing film for sorbing a quantity of the photoresist-stripping agent, thereby altering or shifting a frequency of oscillation of an acoustic wave propagating through the sensing region for indicating an ambient concentration of the agent. According to preferred embodiments of the invention, the acoustic-wave device is a SAW device; and the sensing film comprises poly(vinylacetate), poly(N-vinylpyrrolidinone), or poly(vinylphenol). 3 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 672718
- Patent Number(s):
- 5795993
- Application Number:
- PAN: 8-564,764
- Assignee:
- Sandia Corp., Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 18 Aug 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 54 ENVIRONMENTAL SCIENCES; GAS ANALYSIS; DESIGN; MEASURING INSTRUMENTS; MASKING; MICROELECTRONIC CIRCUITS; SOUND WAVES; ORGANIC SOLVENTS; INDOOR AIR POLLUTION; AIR POLLUTION MONITORS
Citation Formats
Pfeifer, K B, Hoyt, A E, and Frye, G C. Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent. United States: N. p., 1998.
Web.
Pfeifer, K B, Hoyt, A E, & Frye, G C. Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent. United States.
Pfeifer, K B, Hoyt, A E, and Frye, G C. Tue .
"Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent". United States.
@article{osti_672718,
title = {Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent},
author = {Pfeifer, K B and Hoyt, A E and Frye, G C},
abstractNote = {The acoustic-wave sensor is disclosed. The acoustic-wave sensor is designed for ambient or vapor-phase monitoring of a photoresist-stripping agent such as N-methylpyrrolidinone (NMP), ethoxyethylpropionate (EEP) or the like. The acoustic-wave sensor comprises an acoustic-wave device such as a surface-acoustic-wave (SAW) device, a flexural-plate-wave (FPW) device, an acoustic-plate-mode (APM) device, or a thickness-shear-mode (TSM) device (also termed a quartz crystal microbalance or QCM) having a sensing region on a surface thereof. The sensing region includes a sensing film for sorbing a quantity of the photoresist-stripping agent, thereby altering or shifting a frequency of oscillation of an acoustic wave propagating through the sensing region for indicating an ambient concentration of the agent. According to preferred embodiments of the invention, the acoustic-wave device is a SAW device; and the sensing film comprises poly(vinylacetate), poly(N-vinylpyrrolidinone), or poly(vinylphenol). 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 18 00:00:00 EDT 1998},
month = {Tue Aug 18 00:00:00 EDT 1998}
}