Amorphous diamond films
Abstract
Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions. 1 fig.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 672614
- Patent Number(s):
- 5763087
- Application Number:
- PAN: 8-526,396
- Assignee:
- Univ. of California, Oakland, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 9 Jun 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; AMORPHOUS STATE; DIAMONDS; SURFACE COATING; SUBSTRATES
Citation Formats
Falabella, S. Amorphous diamond films. United States: N. p., 1998.
Web.
Falabella, S. Amorphous diamond films. United States.
Falabella, S. Tue .
"Amorphous diamond films". United States.
@article{osti_672614,
title = {Amorphous diamond films},
author = {Falabella, S},
abstractNote = {Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions. 1 fig.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 09 00:00:00 EDT 1998},
month = {Tue Jun 09 00:00:00 EDT 1998}
}
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