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Title: Focused ion beam micromilling and articles therefrom

Abstract

An ultrahigh vacuum focused ion beam micromilling apparatus and process are disclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters. 6 figs.

Inventors:
;
Issue Date:
Research Org.:
University of California
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
672600
Patent Number(s):
5,773,116
Application Number:
PAN: 8-695,326
Assignee:
Univ. of California, Office of Technology Transfer, Alameda, CA (United States) PTO; SCA: 320303; PA: EDB-98:119175; SN: 98002024873
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 30 Jun 1998
Country of Publication:
United States
Language:
English
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; MILLING; ION BEAMS; MILLING MACHINES; DESIGN; MEMORY DEVICES

Citation Formats

Lamartine, B.C., and Stutz, R.A. Focused ion beam micromilling and articles therefrom. United States: N. p., 1998. Web.
Lamartine, B.C., & Stutz, R.A. Focused ion beam micromilling and articles therefrom. United States.
Lamartine, B.C., and Stutz, R.A. Tue . "Focused ion beam micromilling and articles therefrom". United States.
@article{osti_672600,
title = {Focused ion beam micromilling and articles therefrom},
author = {Lamartine, B.C. and Stutz, R.A.},
abstractNote = {An ultrahigh vacuum focused ion beam micromilling apparatus and process are disclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters. 6 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {6}
}